Abstract:Poly(methylmethacrylate) (PMMA) has been widely used in the fields of optical instruments, aviation and auto industry, construction industry, advertising and decoration industry due to its optical transparency, low cost, low toxicity, and less fragile property. Recently it has been exploited to fabricate microfluidic chips. Region-selective metallization of PMMA surfaces are frequently required to improve the surface properties of PMMA and to integrate micro metal devices in PMMA microfluidic chips. This article presents our recent study on region-selective metalization of PMMA by means of UV/O-3-based surface modification in combination of region-selective electroless plating. Deep UV-lights, ozone, and deep UV-lights in cooperation with ozone were compared with respect to the efficiency of hydrophilization of the PMMA surface. It was observed with water contact angle measurements that only synchronized deep UV and ozone treatment can turn the PMMA surface from hydrophobic to hydrophilic effectively. Attenuated total reflection fourier transform infrared spectra revealed that polar moieties such as carboxyl groups were generated on the UV/O-3 treated areas. These polar moieties served as the anchors for further chemical reactions including amination of the carboxyl groups with ethylenediamine, adsorption of chloraurate anion onto the amine groups, and reduction of the Au(III) in the chloraurate anion to Au(0) by borohydride. These reactions led to the formation of the catalysis center of gold nano-particles on the UV-irradiated areas, which is indispensable for region-selective electroless plating. After optimization of the experimental conditions, a novel method for preparation of micro metal devices on PMMA surface has been established. With the printed poly(ethylene terephthalate) (PET) film serving as the primary photo mask, the achievable resolution of the prepared micro metal patterns was 50 mu m or less. The deposited metal films adhered to the PMMA surface so strongly that they could hardly be tore off with adhesive tapes. Micro gold electrodes, micro gold electric heaters, micro copper electrodes, etc. were demonstrated to be prepared on PMMA surfaces, and their physical and electro-chemical properties were characterized.

PMMA nanocolumn array fabricated by catalytic etching and nanomolding technique

Region-selective Metalization of Poly(methylmethacrylate) Surface Based on UV/ozone Surface Modification

Fabrication of Polymethyl Methacrylate (PMMA) Hydrophilic Surfaces Using Combined Offset-Tool-Servo Flycutting and Hot Embossing Methods

Fabrication of 1-d nanochannels on PMMA substrate by photoresist-free uv lithography and UV-assisted bonding under low temperature

Fabrication of Microwell Arrays Based on Two-Dimensional Ordered Polystyrene Microspheres for High-Throughput Single-Cell Analysis.

The fabrication of microlens array in PMMA material with the assistant of nickel pillars by LIGA technology and thermal reflow method

Silicon Nano-Column Fabricated by Catalytic Etching for Electrode of Fuel Cell.

Fabrication of a polymer micro needle array by mask-dragging X-ray lithography and alignment X-ray lithography

Hot embossing of polymer nanochannels using PMMA moulds

Microlens arrays prepared via colloidal microsphere templating

Microlens arrays prepared via colloidal crystal templating

Mechanically Stable PMMA-Based Large-Area Nano-Channels with Sub-10 Nm Depth

Controllable fabrication of periodic arrays of high-aspect-ratio micro-nano hierarchical structures and their superhydrophobicity

Direct Microtip Focused Electrohydrodynamic Jet Printing of Tailored Microlens Arrays on PDMS Nanofilm‐Modified Substrate

Using Micromachined Molds, Partial-curing PDMS Bonding Technique, and Multiple Casting to Create Hybrid Microfluidic Chip for Microlens Array

FABRICATION OF SILICON NANOARRAYS BY DIRECT NANOSPHERE LITHOGRAPHY

Superplastic Nanomolding of Highly Ordered Metallic Sub-Micrometer Pillars Arrays for Surface Enhanced Raman Scattering

Periodic Silicon Nanocones Arrays with Controllable Dimensions Prepared by Two-Step Etching Using Nanosphere Lithography and NH4OH/H2O2 Solution

High aspect ratio arrays of Si nano-pillars using displacement Talbot lithography and gas-MacEtch

Fabrication of Ordered Poly(methyl Methacrylate) Nanobowl Arrays Using SiO2 Colloidal Crystal Templates.

Fabrication of PMMA Nanofluidic Electrochemical Chips with Integrated Microelectrodes.