Optimization of Substrate Materials and Preparation of ZrN Coated Tools

Liu Jianhua,Zhao Wenbo,Lv Yingbo,Zhang Qingyu
DOI: https://doi.org/10.1109/ICMTMA.2011.487
2011-01-01
Abstract:Stresses due to thermal mismatch develop in thin coatings ZrN deposited by arc ion plating technique when cooled down to room temperature from deposition temperature. A 2D finite element model for coating substrate system has been investigated to simulate thermal mismatch stress. It has been validated that mismatch of coefficient of thermal expansion (CTE) and Young's modulus is significant to thermal stresses. When coating's parameters were fixed on, the range of substrates could be limited through the finite element analysis (FEA). And the effects of deposition temperature to residual thermal stress were analyzed. ZrN coatings were deposited by arc ion plating technique on the selected substrates and the properties tested proved the analysis of FEA.
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