Abstract:Precision glass molding is an efficient and promising technique for large-volume micro-optical manufacturing. Even though significant progress in precision glass molding has been achieved on the anti-adhesive coating, technical challenges and barriers still exist towards tailoring the coating layer to ensure durability and long-term processing consistency in numerous molding cycles. This manuscript presents a novel molding technique utilizing micro-patterned Si mold inserts coated with a newly developed nano-graphitic carbon coating as an isolation layer in high-precision glass molding. The coating is prepared by atmospheric pressure chemical vapor deposition (APCVD), in which the liquid benzene and silicone rubber are used as the carbon source and silicon oxycarbide (SiOC) source, respectively. The nano-morphologies of the nano-graphitic carbon coating with different conditions are characterized and analyzed, illustrating notable differences in surface features with the addition of silicone rubber and various growth durations. In the demonstration, the nano-graphitic carbon-coated Si mold inserts exhibit unique properties, including anti-adhesive and hydrophobic at elevated temperatures. Two kinds of micro-patterned Si mold inserts, a micro-pillar matrix and a micro-lens array, generated by UV lithography and diamond turning, are utilized to demonstrate the feasibility of the anti-adhesive coating in precision glass molding. The obtained results indicate that the micro-optical features on the coated Si mold inserts are successfully transferred to glass substrates with high replication fidelity without notable signs of adhesion or contamination in repetitive molding cycles. This emerging technology makes Si an alternative mold material with low surface adhesion, enhances micro-optical machining efficiency, and replicates high-precision, low-cost micro-optics on large scales that were previously unavailable.

Process Parameters of Mold Fabrication for Nano-Imprint Lithography

Optimization of Control Parameters in Micro Hot Embossing

Fabrication of Flexible Mold for Hybrid Nanoimprint-Soft Lithography

A Sandwiched Flexible Polymer Mold for Control of Particle-Induced Defects in Nanoimprint Lithography

Mold cleaning with polydimethylsiloxane for nanoimprint lithography.

Printing Depth Modeling, Printing Process Quantification and Quick-Decision of Printing Parameters in Micro-Vat Polymerization

Effects of Stamp Properties and Printing Pressure on Microcontact Printing Process

Scanning probe lithography for nanoimprinting mould fabrication

High Resolution Soft Mold for UV-curing Nanoimprint Lithography Using an Oxygen Insensitive Degradable Material

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Impact of process parameters on the flow behavior and filling accuracy of photoresist in hot embossing for microgroove array

Importance of Molds for Nanoimprint Lithography: Hard, Soft, and Hybrid Molds

Molecular dynamics simulation study of the degradation of polymer nanopatterns created by nanoimprint

Optimal conditions for controllable one-dimensional nanomold by selective etching of multilayer film

Hydrodynamics and solid mechanics structural analysis of mold deformation in nanoimprint lithography

Study on nano-graphitic carbon coating on Si mold insert for precision glass molding

Coarse-Grain Simulations of the Polymer Filling Process in Nanolithography

Molecular Dynamics Investigation of the Deformation Mechanism of Gold with Variations in Mold Profiles during Nanoimprinting

Uptake and Metabolism of d-Glucose by Neocosmospora vasinfecta E. F. Smith.

Fabrication of 2D silicon nano-mold by side etch lift-off method