Fabrication of periodic square arrays by angle-resolved nanosphere lithography

Kwang Hong Lee,Qiu Ling Chen,Chan Hoe Yip,Qingfeng Yan,Chee Cheong Wong

DOI: https://doi.org/10.1016/j.mee.2009.11.169

IF: 2.3

2010-01-01

Microelectronic Engineering

Abstract:We investigate the fabrication of periodic square arrays of solid gold islands by angle-resolved nanosphere lithography (ARNSL) in conjunction with thermal evaporation and etching. By varying @q (the tilt angle between the direction of gold deposition beam and the substrate surface normal) and @f (the substrate rotation angle about the beam axis), adjacent islands on a deposited hexagonal gold array will have a constant and periodic difference in height. Upon etching, this height bias will result in the shorter structures being removed to produce an array with a different symmetry from the original hexagonal symmetry of the parent mask. By depositing at three directions of @f=0^o, 120^o and -120^o with a constant @q=20^o, experimental results show that deposited two-dimensional gold periodic arrays will have a measurable difference in height between adjacent islands. Etching of the resulting patterns produced periodic near-square arrays with triangular nanostructures. Thus the combination of ARNSL and etching can allow selective periodic nanostructures to be removed, increasing the diversity of array symmetries available through nanosphere lithography.