Abstract:Abstract Advances in femtosecond laser-material interaction facilitate the extension of maskless optical processing to the high efficiency and deep-subwavelength scale. Here, a hybrid plasmon lithography technique has been demonstrated by irradiating near-infrared femtosecond laser pulses onto the Si material coated with thin Cr films in a vacuum chamber, and superior nanograting structures are found to deeply penetrate through the thin Cr film into the underlying Si substrate. In stark contrast to the common ripple structures formed on the Si surface, the Cr-layer mediated Si nanograting structures not only exhibit the spatially super-regular arrangements with a deep-subwavelength period of 355 nm but also present the nonsinusoidal sharp-edged groove geometry with a large depth-to-width aspect ratio of 2.1. Theoretical analyses and calculations reveal that the anomalous structure characterizations are physically ascribed to the excitation of dual-interface coupled plasmons in the thin metal layer, which possess the squeezed spatial wavelength and the periodic columnar intensity distributions. Moreover, the further deepening of periodic nanostructures into the Si substrate is also elucidated by the simulation of electric field enhancements at the bottom of shallow grooves under irradiation of subsequent laser pulses. In combination with a wet etching process, the Si nanograting structures can be modified into the smooth and narrow-mouthed V -profiles, whose optical measurements show a near omnidirectional antireflection especially in the visible range of 565–750 nm, which is expected for the design of advanced photonic devices.

Crystallization-dependent 100-nm periodic structures on gold and graphene based on femtosecond laser irradiation

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation

Ultrafast Laser-Induced Premelting and Structural Transformation of Gold Nanorod

Ordered Au Nanocrystals on a Substrate Formed by Light-Induced Rapid Annealing.

Large area single crystal gold of single nanometer thickness for nanophotonics

Supercrystal engineering of atomically precise gold nanoparticles promoted by surface dynamics

Evolution of Femtosecond Laser-Induced Periodic Structures: from Nanoholes to Regular Structures

Large Area Uniform Nanostructures Fabricated by Direct Femtosecond Laser Ablation

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

Formation of Highly Tunable Periodic Plasmonic Structures on Gold Films Using Direct Laser Writing

Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

Laser Induced Surface Nanostructuring on Ultra-Thin Amorphous Si Films

Hybrid periodic microstructures fabricated on chromium films by SLM-assisted nanosecond laser processing

Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling

The double edged sword of femtosecond laser induced periodic surface structures for sub diffraction and high efficient nanotexturing

Femtosecond laser-induced large area of periodic structures on chalcogenide glass via twice laser direct-writing scanning process

Arbitrary Gold Nanoparticle Arrays Fabricated Through AFM Nanoxerography and Interfacial Seeded Growth

Variety of Nanostructures Induced by Femtosecond Laser Pulses on Surface of Au/Cr Film Stack

Microstructures of Patterned Nc-Si Superlattices Made by Pulsed Laser Interference Crystallization

Assembling of gold nanorods by femtosecond laser fabrication