A Comparative Study on the Diffusion Behaviors of Metal and Oxygen Ions in Metal-Oxide-Based Resistance Switches via ab Initio Molecular Dynamics Simulations

Bo Xiao,Xuefang Yu,Satoshi Watanabe
DOI: https://doi.org/10.1021/acsaelm.9b00049
IF: 4.494
2019-04-04
ACS Applied Electronic Materials
Abstract:Wedig et al.’s recent experiment ( Wedig, A. ; Nature Nanotech. 2016, 11, 67.) revealed that the diffusion of both metal (M) and O ions occurs in MO x -based resistance switches. However, the diffusion mechanism and the competition between the diffusion of M and O ions during switching processes are still unclear. In this work, taking amorphous TaO x and HfO y as examples, we have studied the diffusion behaviors of Ta/Hf and O ions by using extensive molecular dynamics simulations. Our results reveal that the mobilities of Ta/Hf ions increase and approach those of O ions with the decrease of O content, which is attributed to the changes in M/O coordination numbers and M–O/M–M bond strength. Interestingly, in the conductive filament region, the mobilities of Ta (or Hf) ions are comparable to (or less significant than) those of O ions, and thus, the diffusion of both Ta and O ions takes important roles in the TaO x -based device, whereas O ion diffusion is predominant in the HfO y -based device, even though Hf ions are mobile.
materials science, multidisciplinary,engineering, electrical & electronic
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