Influences of Source/Drain Extension Region on Thermal Behavior of Stacked Nanosheet FET

Shobhit Srivastava,Sourabh Panwar,M. Shashidhara,Lomash Chandra,Neeraj Mishra,Abhishek Acharya
DOI: https://doi.org/10.1109/ted.2024.3351596
IF: 3.1
2024-03-06
IEEE Transactions on Electron Devices
Abstract:A well-calibrated numerical-simulation-based study reveals that an elongated extension region can be a notable approach for the self-heating mitigation of nanosheet FETs. It is observed that a longer extension length ( = 8 nm) reduces the ON current; however, it holds a smaller penalty in degradation (~10%) due to the self-heating effect (SHE). When the extension region is increased from 2 to 8 nm, a reduction of in is observed along with a reduction of ~9 mV/dec in the subthreshold swing. On the contrary, a change in ~15 mV in is observed when is increased from 2 to 8 nm. Considering lattice heat due to SHE, intrinsic delay, unity-gain bandwidth, and the above-mentioned characteristic, the optimum would be 5–6 nm. The longer extension lengths (2–8-nm increase) provide a lesser transconductance ( ) degradation (~15%) due to SHE. It is observed that intrinsic capacitance reduces with an increment in (2–8 nm), which eventually reduces the propagation delay (~20%) with an improvement in noise margin too. It is worth noting that for a common source amplifier, a longer extension region of 8 nm will also provide more voltage gain when compared with of 2 nm, which increases to in self-heating condition due to a smaller degradation " " (from ~12.4% to ~6.6%) in gain with longer extension length.
engineering, electrical & electronic,physics, applied
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