Exploring Sheet Thickness Scaling and Substrate Orientation for Maximizing Nanosheet pFET Performance

Ramandeep Kaur,Nihar R. Mohapatra
DOI: https://doi.org/10.1109/ted.2024.3434775
IF: 3.1
2024-08-28
IEEE Transactions on Electron Devices
Abstract:We explored the performance of p-type nanosheet FETs (NsFETs) with sheet thickness scaling using a well-calibrated subband BTE solver that accounts for quantum confinement. Our investigation revealed that despite enhancements in gate electrostatics, the confined pFETs exhibit significantly reduced hole mobility due to increased phonon and surface roughness scattering (SRS). It is also found that introducing uniaxial compressive stress into the channel with an ideally flat surface (very low surface roughness) could boost the pFET on-current by approximately 2.5 times. Furthermore, by integrating p-type NsFETs on substrate, rather than on conventional substrate, it is likely to yield superior hole mobility and overall device performance, particularly at scaled sheet thicknesses.
engineering, electrical & electronic,physics, applied
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