Investigation of Coatings Formed by Thermal Oxidation on Monocrystalline Silicon

B. D. IgamovG. T. ImanovaA. I. KamardinI. R. Bekpulatova Scientific and Technical Center with a Design Bureau and Pilot Production of the Academy of Sciences of the Republic of Uzbekistan,Tashkent,Republic of Uzbekistanb Institute of Radiation Problems,Ministry of Science and Education Republic of Azerbaijan,Baku,Azerbaijanc UNEC Research Center for Sustainable Development and Green Economy Named after Nizami Ganjavi,Azerbaijan State University of Economics (UNEC),Baku,Azerbaijand Khazar University,Department of Physics and Electronics,Baku,Azerbaijane Karshi State University,Karshi,Uzbekistan
DOI: https://doi.org/10.1080/10584587.2023.2296317
2024-02-09
Integrated Ferroelectrics
Abstract:The results of complex experimental studies of the parameters of thin coatings of SiO 2 oxides on Si, formed by thermal oxidation at temperatures of 1200 °C, including studies using electron and X-ray spectroscopy, IR-Fourier spectrometer IRTracer-100 - developed by Shimadzu, Raman scattering, and test electrophysical structures, are presented. Data have been obtained that for a silicon dioxide thickness of about 400 nm, the porosity of the coating does not exceed 2/cm 2 , and the electric field strength for the breakdown of the dioxide reaches 5·10 6 V/cm. The crystal structure of SiO 2 is triclinic, lattice period a = 4.9160 Å, b = 4.9170 Å, c = 5.4070 Å, a = 90.000, b = 90.000, γ = 120.000, density 2.64 g/cm3.
engineering, electrical & electronic,physics, condensed matter, applied
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