Design, Modeling, and Fabrication of High-Speed VCSEL with Data Rate up to 50 Gb/s
Chih-Chiang Shen,Tsung-Chi Hsu,Yen-Wei Yeh,Chieh-Yu Kang,Yun-Ting Lu,Hon-Way Lin,Hsien-Yao Tseng,Yu-Tzu Chen,Cheng-Yuan Chen,Chien-Chung Lin,Chao-Hsin Wu,Po-Tsung Lee,Yang Sheng,Ching-Hsueh Chiu,Hao-Chung Kuo
DOI: https://doi.org/10.1186/s11671-019-3107-7
2019-08-14
Nanoscale Research Letters
Abstract:We have studied the characteristics of frequency response at 850-nm GaAs high-speed vertical-cavity surface-emitting lasers (VCSELs) with different kinds of oxide aperture sizes and cavity length using the PICS3D simulation program. Using 5-μm oxide aperture sizes, the frequency response behavior can be improved from 18.4 GHz and 15.5 GHz to 21.2 GHz and 19 GHz in a maximum of 3 dB at 25 °C and 85 °C, respectively. Numerical simulation results also suggest that the frequency response performances improved from 21.2 GHz and 19 GHz to 30.5 GHz and 24.5 GHz in a maximum of 3 dB at 25 °C and 85 °C due to the reduction of cavity length from 3λ/2 to λ/2. Consequently, the high-speed VCSEL devices were fabricated on a modified structure and exhibited 50-Gb/s data rate at 85 °C.
materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology