A closed-loop readout interface for MEMS accelerometer with time-multiplexing electrostatic force feedback

Liang Yin,Zhiyuan Sun,Jianfeng Yu

DOI: https://doi.org/10.1142/s0217984919504475

2019-12-16

Abstract:The noise and linearity performance of a MEMS accelerometer is a critical issue for land seismic acquisition applications. Incorporating closed-loop force feedback is an effective way to enhance th...

Physics,Engineering,Computer Science

What problem does this paper attempt to address?

Noise Behaviors of a Closed-Loop Micro-Electromechanical System Capacitive Accelerometer

Ming-jun Ma,Zhong-he Jin,Yi-dong Liu,Tie-ying Ma

DOI: https://doi.org/10.1007/s11771-015-3014-8

2015-01-01

Journal of Central South University

Abstract:The noise of closed loop micro-electromechanical systems（MEMS） capacitive accelerometer is treated as one of the significant performance specifications.Traditional optimization of noise performance often focuses on designing large capacitive sensitivity accelerometer and applying closed loop structure to shape total noise,but different noise sources in closed loop and their behaviors at low frequencies are seldom carefully studied,especially their behaviors with different electronic parameters.In this work,a thorough noise analysis is established focusing on the four noise sources transfer functions near 0 Hz with simplified electronic parameters in closed loop,and it is found that the total electronic noise equivalent acceleration varies differently at different frequency points,such that the noise spectrum shape at low frequencies can be altered from 1/f noise-like shape to flat spectrum shape.The bias instability changes as a consequence.With appropriate parameters settings,the 670 Hz resonant frequency accelerometer can reach resolution of 2.6 μg/（Hz）1/2 at 2 Hz and 6 μg bias instability,and 1300 Hz accelerometer can achieve 5μg/（Hz）1/2 at 2 Hz and 31 μg bias instability.Both accelerometers have flat spectrum profile from 2 Hz to 15 Hz.
A Stiffness-Tunable MEMS Accelerometer

Yixuan Guo,Zhipeng Ma,Tengfei Zhang,Xudong Zheng,Zhonghe Jin

DOI: https://doi.org/10.1088/1361-6439/abcedb

2020-01-01

Journal of Micromechanics and Microengineering

Abstract:This paper reports a novel MEMS accelerometer whose effective stiffness can be adjusted flexibly and even tuned to almost zero by using the electrostatic softening effect of two parallel plate capacitors: the comb-finger capacitor and the triangular capacitor. When applied to a biased voltage, the comb-finger capacitor provides a relatively large and nonlinear negative stiffness in the gap-varying direction, while the triangular capacitor produces a small yet linear negative stiffness in the area-varying direction. The proposed accelerometer is fabricated by using a standard silicon-on-glass manufacturing process and controlled by a customized digital circuit. An analytical model based on the pull-in dynamics as a result of the stiffness tuning is developed and simulated to investigate the dynamic behavior of the nonlinear accelerometer system. The proportion integral differential controller is utilized to improve the performance of the accelerometer while maintaining the stability of the closed-loop system operating with extremely low effective stiffness. The experimental results indicate that a two-fold increase of the sensitivity, a 30% reduction of Allan deviation bias instability, and a 20% reduction of Allan velocity random walk are achieved for the open-loop accelerometer system. A 75% decrease of the standard deviation bias instability and nearly two orders of magnitude improvement of the noise floor at 1 Hz for the closed-loop accelerometer system are realized when the effective stiffness is reduced to almost zero.
Fuzzy Sliding-Mode Control of the Electrostatically Tuned Quasi-Zero Stiffness MEMS Accelerometer.

Ziyi Ye,Zhipeng Ma,Yixuan Guo,Yiming Jin,Tengfei Zhang,Xudong Zheng,Zhonghe Jin

DOI: https://doi.org/10.1109/nems54180.2022.9791170

2022-01-01

Abstract:In order to compromise between the bandwidth and the output stability of the previously proposed quasi-zero stiffness MEMS accelerometer, we proposed a novel fuzzy sliding-mode (FSM) controller that enables varying the switching force based on the observation of the position and velocity of the proof mass autonomously. The closed-loop control of the developed accelerometer which is implemented with the FSM control algorithm is evaluated in terms of the bandwidth and output stability. The results show the FSM-controlled accelerometer has a close bandwidth yet much-improved noise floor in comparison with the previously proposed proportional integral sliding mode (PISM) controlled accelerometer.
Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Peiji Sun,Xuan She,Junjie Yao,Kan Chen,Ran Bi,Lei Wang,Xiaowu Shu

DOI: https://doi.org/10.1109/jlt.2022.3163737

IF: 4.7

2022-01-01

Journal of Lightwave Technology

Abstract:In this paper, we design a monolithic integrated micro-opto-electromechanical system(MOEMS) accelerometer based on the Michelson interferometer structure. The accelerometer realizes the on-chip integration of the mode spot converter, the sensing optical path, the phase modulator and the photonic crystal reflector, and it senses the external acceleration through a “three-beam” structure which is composed of a central support beam and two tiny beams. The push-pull structure eliminates the coupling crosstalk caused by paraxial acceleration. Accurate results are demonstrated as follows: an accelerometer mechanical sensitivity of 3.638 nm/g, with a resonance frequency of 1742.2 Hz and a linear measurement range of ± 500 g, corresponding to a foot print of the core part with 960 μm×600 μm. With its high precision, large measurement range, and small size, the proposed accelerometer may pave the way for the applications in civil, industrial and military fields.
A Real-Time Temperature Compensation Algorithm for a Force-Rebalanced MEMS Capacitive Accelerometer Based on Resonant Frequency.

Jiehui Du,Yixuan Guo,Yiyu Lin,Xudong Zheng,Zhonghe Jin

DOI: https://doi.org/10.1109/nems.2017.8017009

2017-01-01

Abstract:This paper presents a real-time temperature compensation algorithm for a force-rebalanced MEMS capacitive accelerometer which relies on the linear relationship between the temperature and its dynamical resonant frequency. A phase-locked loop (PLL), where we inject a drive signal to excite the accelerometer into resonance and track the real-time resonant frequency, is added to the conventional force-rebalanced loop to compensate for the temperature-induced output drifts. Experiments demonstrate that the first-order temperature dependence of the resonant frequency is -0.1308 Hz/°C. The bias offset of the accelerometer has a first-order temperature coefficient of 3.54 mg/°C, which is significantly reduced to 0.05 mg/°C after compensation. Besides the improved bias instability of 1.6 μg after compensation, the long-term drift at the integration time of 100 s is suppressed more than one order of magnitude, from 35 μg to 2.4 μg, in the Allan deviation plot, which reveals the inhibition of the temperature-related performance deterioration.
High Performance Interface Circuit for MEMS Gyroscope

WANG Hui-quan,YU Fa-xin,JIN Zhong-he,ZHENG Xu-dong,CHEN Yong,JIAO Ji-wei,WANG Yue-lin

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.04.053

2006-01-01

Abstract:Interface circuit for a MEMS gyroscope is optimized, which includes a close-loop driven circuit and a detected circuit. Output of the gyro is very low that the interface circuit followed it is very important. By carefully designing the interface circuit followed the gyro, the automatic gain control circuit in the close-loop driven circuit and the detected circuit, performance of the system is improved, the gyro’s resolution reaches 180°/h, with scale factor 9.8 mV/~ (o) ·s~ -1 , nonlinearity 0.43%.
Design of Force-Balance Capacitive Accelerometer

Yu CHEN,Fa-xin YU,Hui-quan WANG,Zhong-he JIN,Yue-lin WANG

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.02.035

2006-01-01

Abstract:Micro-mechanical capacitive accelerometer is one kind of high sensitive inertial sensors which convert the acceleration to differential capacitance and the acceleration value can be obtained by detecting the variation of the micro defferential capacitance. Using the switching capacity circuit to realize the C-V convert and using the feedback of the electrostatic force to realize force-balance closed-loop control, the micro-mechanical capacitive accelerometer is designed. The mathematic model of the capacitive accelerometer and its peripheral interface circuit is set up. On this basis, the transfer function of the closed-loop operation system is derived. And the measurement results on the system is shown too.
A Seismic-Grade Optical MEMS Accelerometer with Force Feedback Control

Cheng Li,Zhenyu Sun,Xiang Zheng,Bo Yang,Luqiang Zhou

DOI: https://doi.org/10.23919/ICINS51784.2022.9815378

2022-05-30

Abstract:This work presents design, fabrication and experimental demonstration of a high-resolution optical Micro-Electro-Mechanical Systems (MEMS) accelerometer applicable to microseismic observations. This device employs a deformable grating based interferometer to transduce tiny accelerations into variations of light intensity. A low-frequency Z-axis-sensitive MEMS sensing structure, which has a three-dimensional (3D)-suspension design, is fabricated to serve as the deformable element. The mechanical and optical modules are both assembled into a small-size accelerometer prototype, featuring compactness and portability. In order to enlarge the limited dynamic range, a force feedback mechanism and the dedicated control loop are developed. A series of experiments are then carried out to verify the sensor functionalities. It is proved that a measurement range of 1.012 mg has been achieved with a voltage sensitivity of 3250 V/g and a linear coefficient (R2) of 0.99927. Additionally, the inherent microseismic peaks of Earth are tracked by this device, demonstrating a low instrumental noise of 10 ng/√Hz from 0.2 Hz to 10 Hz.

Physics,Engineering
A Digital Readout Interface For A Surface Micromachined Mems Accelerometer With A Novel Loop Compensator

Dongliang Chen,Liang Yin,Qiang Fu,Yufeng Zhang,Xiaowei Liu

DOI: https://doi.org/10.1142/S0217984920503029

2020-01-01

Modern Physics Letters B

Abstract:This paper proposes a novel digital readout interface for capacitive MEMS accelerometer. The digitalization is fulfilled by incorporating a 1-bit Sigma Delta (sigma-delta) modulator into the closed servo loop. It both realizes a direct digital output efficiently and linearizes the electrostatic feedback force. To maintain the stability and improve loop linearity, a discrete-time proportional integral and differential (PID) compensator is used. It improves the in-band gain, enhances quantization noise suppressing ability and maintain the high-frequency phase margin at the same time. Thus the linearity and noise performance are improved. The whole chip is fabricated using 0.35 mu m CMOS-BCD technology. Test results show that, the linearity is better than 0.1% and the noise floor is as low as 1 mu g/root Hz.
A self-centering and stiffness-controlled MEMS accelerometer

Yiming Jin,Zhipeng Ma,Ziyi Ye,Mingkang Li,Xudong Zheng,Zhonghe Jin

DOI: https://doi.org/10.1038/s41378-023-00647-4

2024-01-18

Microsystems & Nanoengineering

Abstract:Abstract This paper presents a high-performance MEMS accelerometer with a DC/AC electrostatic stiffness tuning capability based on double-sided parallel plates (DSPPs). DC and AC electrostatic tuning enable the adjustment of the effective stiffness and the calibration of the geometric offset of the proof mass, respectively. A dynamical model of the proposed accelerometer was developed considering both DC/AC electrostatic tuning and the temperature effect. Based on the dynamical model, a self-centering closed loop is proposed for pulling the reference position of the force-to-rebalance (FTR) to the geometric center of DSPP. The self-centering accelerometer operates at the optimal reference position by eliminating the temperature drift of the readout circuit and nulling the net electrostatic tuning forces. The stiffness closed-loop is also incorporated to prevent the pull-in instability of the tuned low-stiffness accelerometer under a dramatic temperature variation. Real-time adjustments of the reference position and the DC tuning voltage are utilized to compensate for the residue temperature drift of the proposed accelerometer. As a result, a novel controlling approach composed of a self-centering closed loop, stiffness-closed loop, and temperature drift compensation is achieved for the accelerometer, realizing a temperature drift coefficient (TDC) of approximately 7 μg/°C and an Allan bias instability of less than 1 μg.

nanoscience & nanotechnology,instruments & instrumentation
Noise Analysis and Performance Improvement of a MEMS Fabry-Pérot Seismic Accelerometer

Minghui Zhao,Yonghong Qi,Xiaopeng Zhang,Bo Li,Zhuangde Jiang,Xueyong Wei

DOI: https://doi.org/10.1109/jsen.2021.3128534

IF: 4.3

2022-01-01

IEEE Sensors Journal

Abstract:MEMS accelerometers based on the optical interference technique play an important role in seismic wave detection due to their high resolution, strong electromagnetic stability, and low cost. This paper reports a MEMS Fabry-Pérot seismic accelerometer. The working principle and transfer function were established to introduce the accelerometer. Noise sources that contribute to the output of the accelerometer were analyzed and predicted. To improve the performance of the accelerometer, the active temperature compensation, the appropriate laser driving current selection, and the laser modulation-demodulation technologies were adopted to reduce the noise. Experimental results show that the noise floor of the accelerometer was decreased from $11 ~mu ext{g}/surd $ Hz@1 Hz to 330 ng/$surd $ Hz@1 Hz.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
High Power-Efficiency Readout Circuit for MEMS Capacitive Accelerometer

Longjie Zhong,Leyang Xue,Xiangyi Deng,Shubin Liu,Zhangming Zhu

DOI: https://doi.org/10.1109/tcsii.2023.3304636

2024-01-01

Abstract:MEMS capacitive accelerometers play a fundamental role in a wide range of monitoring systems for the Internet of Things (IoT) applications. In these applications, sensors are powered by battery, therefore high power-efficiency is required to extend battery life. To promote high efficiency design technique, the innovation on the readout circuit is of significance. In recent years, there has been growing interest in developing high power-efficiency readout circuit with specific performances, such as low power consumption and compact area required by wearable devices, low noise floor required by industrial instrument and high bandwidth required by vibration monitoring. The force feedback structure, the voltage-controlled structure and the charge-balanced structure are three important structures for the readout circuit to meet these performance requirements. This brief presents the important progresses of these three readout structures in recent years and summarizes the development trends in the future.
A MEMS-Based Electrochemical Angular Accelerometer With a Force-Balanced Negative Feedback

Tian Liang,Junbo Wang,Deyong Chen,Bowen Liu,Xu She,Chao Xu,Wenjie Qi,Vadim Agafonov,Egor Egorov,Jian Chen

DOI: https://doi.org/10.1109/jsen.2021.3075748

IF: 4.3

2021-07-15

IEEE Sensors Journal

Abstract:This paper presents a MEMS based electrochemical angular accelerometer with feedback where the relative movement between the liquid inertial mass and the sensitive microelectrodes was counter balanced by the feedback force. Theoretical analysis was conducted to model the response of the angular accelerometer with feedback. Both sensitive and feedback electrodes were made based on microfabrication and assembled to form MEMS based electrochemical angular accelerometer with feedback. Device characterization was conducted, locating a sensitivity of 8 V/(rad/s<sup>2</sup>), a bandwidth of 0.0083-8 Hz and a noise level of $6.31times 10 ^{-7}$ (rad/ $text{s}^{2})/surd $ Hz. In comparison to previously reported MEMS based electrochemical angular accelerometer without feedback, a significant improvement at low frequencies in 3dB bandwidth (0.0083-8 Hz vs. 0.02-10 Hz) was achieved due to the inclusion of the feedback part. This study can provide a new perspective for the development of electrochemical angular accelerometer, which may be further used in seismic monitoring.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Time Divided Architecture for Closed Loop MEMS Capacitive Accelerometer

Jingqing Huang,Tingting Zhang,Meng Zhao,Lichen Hong,Yacong Zhang,Wengao Lu,Zhongjian Chen,Yilong Hao

DOI: https://doi.org/10.1109/icsict.2012.6466758

2012-01-01

Scientia Forestalis

Abstract:This paper mainly discusses issues concerning the architecture of time divided closed loop accelerometer. For this particular architecture mathematical relationship between the external acceleration detected by sensor and the voltage output of the readout circuits is deduced. Both Matlab/Simulink model and Verilog-A model for such architecture are established. Simulation results agree with the mathematical formula. Readout circuits designed to work under 50kHz with feedback duty cycle η being 60% are fabricated using 0.35μm HV CMOS process. Test results show a sensitivity of 1.518V/g.
A Low-Noise Readout Interface For Silicon Mems Vibratory Gyroscope

Xiaowei Liu,Dongliang Chen,Keguan Song

DOI: https://doi.org/10.1142/S021798492150069X

2021-01-01

Modern Physics Letters B

Abstract:This paper proposes a novel readout interface for a high-precision silicon MEMS vibratory gyroscope. The readout interface contains a closed-loop self-resonating driving circuit and a low-noise open-loop capacitance sensing circuit. In order to achieve an overall optimization in noise performance, the noise in driving loop of the interface is analyzed in detail. After the noise optimization, the driving frequency stability achieves 0.93 ppm, the front-end capacitance resolution achieves 0.002 aF/p Hz. The total zero bias instability achieves 3:82ffi/h,
Cmos Interface Circuitry For A Closed-Loop Capacitive Mems Accelerometer

Yuntao Liu,Xiaowei Liu,Liang Yin,Weiping Chen,Qun Wu

DOI: https://doi.org/10.1109/NEMS.2009.5068630

2009-01-01

Abstract:A CMOS interface circuitry for closed-loop capacitive MEMS accelerometer is presented in this paper. The switched-capacitor (SC) charge integration method is used for the capacitive sensing, correlated double sampling (CDS) technique is introduced to compensate the finite gain of operation amplifiers, reduce IN noise and offsets. In order to enhance stability of system and the frequency response performance, proportional-integral- differential (PID) adjuster are applied. An elaborate layout design with 0.5um CMOS process was completed and nonidealities are analyzed and optimized. The post-simulation results indicate that the sensitivity of the system is 1.22V/g, the full measurement range is -3g to +3g the minimum acceleration detected can be achieved 30ug, nonlinearity is less than 0.16%.
Study Of Closed-Loop High-Resolution Sigma-Delta For A Mems Accelerometer

Zhiyuan Sun,Liang Yin,Xiangyu Li,Qiang Fu,Xiaowei Liu

DOI: https://doi.org/10.1587/elex.14.20171090

2018-01-01

IEICE Electronics Express

Abstract:In this paper, a high-resolution Sigma-Delta (Sigma Delta) modulator in a standard 0.5 mu m CMOS technology for a MEMS accelerometer is presented. The digital output is attained by the interface circuit based on a low-noise front-end charge-amplifier and a back-end forth-order Sigma-Delta modulator. The low-noise front-end detection circuit is proposed with correlated double sampling (CDS) technique to eliminate the 1/f noise and offset of operational amplifier. The capacitance compensation array is used for rejecting the sensor element mechanical offset. The lead compensator circuit is to ensure the stability of the high-order closed-loop system. The interface is fabricated in a standard 0.5 mu m CMOS process and the active circuit area is about 8 mm(2). The MEMS accelerometer system consumes 25 mW from a single 7 V supply at a sampling frequency of 250 kHz. The Sigma Delta modulator can achieve an effective number of bits 20.30 bits and an average noise floor in low-frequency range of 140 dB.
A New Method to Measure Adhesion and Surface Forces Using A Closed-Loop Accelerometer

Haosheng Chen,Jiang Li,Darong Chen

DOI: https://doi.org/10.1163/156856106776381785

IF: 2.431

2006-01-01

Journal of Adhesion Science and Technology

Abstract:A force-balanced MEMS sensor is developed to measure the forces between two surfaces with controllable distance. Its mechanical structure is like a pendulous micromachined accelerometer, and it is designed as a closed-loop system with electrostatic force feedback. The surface force on the sensor probe is balanced by the electrostatic force and the probe operates without displacement. This method avoids the displacement of the conventional cantilever, and the distance between the two surfaces is precisely controlled during the measurement. Experiments on surface force measurements between a probe surface and a ball surface are performed, and the attractive force and adhesion force between the two surfaces are measured under a precise distance controlled by a nanopositioner.
Design Of Readout Circuits Used For Micro-Machined Capacitive Accelerometer

Xiaowei Liu,Haifeng Zhang,Guangming Li,Weiping Chen,Xilian Wang

DOI: https://doi.org/10.1109/NEMS.2007.352076

2007-01-01

Abstract:This paper describes a closed-loop micro-machined accelerometer implemented in a bulk-micromachining technology with integrated CMOS circuit. The operational principle of accelerometer is detailed. We establish a mathematical model of closed-loop system to compare the performance with the open accelerometer. Electrostatic force is served as a negative feedback in closed-loop operating mode to improve the bandwidth, linearity and dynamic range of micro-machined capacitive accelerometer. The noise source affected readout circuit is discussed to optimize circuit structure. The circuit is simulated using Hspice. The result of the circuit simulation shows good sensitivity and low power consumption. The sensor is designed to measure +/- 5g acceleration. Device sensitivity is larger than 15mV/g.
Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor

Yongjun Yang,Yalin Wang

DOI: https://doi.org/10.1051/MATECCONF/201816005008

Abstract:High-Q sensing element is desirable for high performance while makes the loop control a great challenge. This paper presents a closed-loop system for high-Q capacitive MEMS accelerometer which has achieved loop control effectively. The proportional-derivative(PD)control is developed in the system to improve the system stability. In addition, pulse width modulation (PWM) electrostatic force feedback is designed in the loop to overcome the nonlinearity. Furthermore, a sigma-delta (ΣΔ) modulator with noise shaping is built to realize digital output. System model is built in Matlab/Simulink. The simulation results indicate that equivalent Q value is reduced to 1.5 to ensure stability and responsiveness of the system. The effective number of bits of system output is 14.7 bits. The system nonlinearity is less than 5‰. The equivalent linear model including main noise factors is built, and then a complete theory of noise and linearity analysis is established to contribute to common MEMS accelerometer research.

Engineering

A closed-loop readout interface for MEMS accelerometer with time-multiplexing electrostatic force feedback

Noise Behaviors of a Closed-Loop Micro-Electromechanical System Capacitive Accelerometer

A Stiffness-Tunable MEMS Accelerometer

Fuzzy Sliding-Mode Control of the Electrostatically Tuned Quasi-Zero Stiffness MEMS Accelerometer.

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

A Real-Time Temperature Compensation Algorithm for a Force-Rebalanced MEMS Capacitive Accelerometer Based on Resonant Frequency.

High Performance Interface Circuit for MEMS Gyroscope

Design of Force-Balance Capacitive Accelerometer

A Seismic-Grade Optical MEMS Accelerometer with Force Feedback Control

A Digital Readout Interface For A Surface Micromachined Mems Accelerometer With A Novel Loop Compensator

A self-centering and stiffness-controlled MEMS accelerometer

Noise Analysis and Performance Improvement of a MEMS Fabry-Pérot Seismic Accelerometer

High Power-Efficiency Readout Circuit for MEMS Capacitive Accelerometer

A MEMS-Based Electrochemical Angular Accelerometer With a Force-Balanced Negative Feedback

Time Divided Architecture for Closed Loop MEMS Capacitive Accelerometer

A Low-Noise Readout Interface For Silicon Mems Vibratory Gyroscope

Cmos Interface Circuitry For A Closed-Loop Capacitive Mems Accelerometer

Study Of Closed-Loop High-Resolution Sigma-Delta For A Mems Accelerometer

A New Method to Measure Adhesion and Surface Forces Using A Closed-Loop Accelerometer

Design Of Readout Circuits Used For Micro-Machined Capacitive Accelerometer

Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor