Abstract:A site-specific xenon plasma focused ion beam preparation technique for microcantilever samples (1-20 µm width and 1:10 aspect ratio) is presented. The novelty of the methodology is the use of a chunk lift-out onto a clean silicon wafer to facilitate easy access of a low-cost probe type indenter which provides bending force measurement. The lift-out method allows sufficient room for the indenter and a line of sight for the electron beam to enable displacement measurement. An electroplated nanotwinned copper (NTC) was cut to a 3 × 3 × 25 µm microbeam and in situ mechanically tested using the developed technique. It demonstrated measured values of Youngs modulus of 78.7 ± 11 GPa and flow stress of 0.80 ± 0.05 GPa, which is within the ranges reported in the literature. LAY DESCRIPTION: In this paper a site specific method is present for making particularly small mechanical tests samples, of the order of 100th the size of a human hair. These small samples can then be used to determine the mechanical properties of the bulk material. Copper with a nano twinned grain structure is used as a test medium. Ion milling was used to cut the sample to shape and a micro probe was used for mechanical testing. Ion milling can cut away very small volumes of material as it accelerates ions at the surface of the sample, atomically machining the sample. Micro probes are a cost-effective small-scale load measurement devices, however, they require a large area for accessing the sample. The indenter requirements are a problem when making you samples with ion milling as ion millers are best at making small cuts. Our aim was to design a cutting strategy which reduces the amount of cutting required while allowing samples to be fabricated anywhere on the sample. We used a chunk lift out technique to remove a piece of material which is then welded to a wafer of silicon this gives sufficient space around the sample for ion milling and testing. The additional space allowed easy access for the probe. A 3 × 3 × 10 µm micro cantilever beam was cut out from copper, this beam was then bent. The force from bending and distance bent was measured and converted into Youngs modulus which is a measure of flexibility. The modulus value measured was comparable to the values reported in other papers.

Artifact-free sample preparation of metal thin films using Xe plasma-focused ion beam milling for atomic resolution and in situ biasing analyses

Self-marked preparation of site-specific transmission electron microscope lamellae of nanodevices using focusing ion beam technique.

Effect of Ion Irradiation Introduced by Focused Ion-Beam Milling on the Mechanical Behaviour of Sub-Micron-Sized Samples

FIB-shield: a Structure to Safely Transfer and Precisely Mount Beam-Sensitive TEM Specimens under Focused Ion Beam

Observation of Focused Ion Beam-Induced Artifacts in Transmission Electron Microscopy Samples Leading to the Epitaxial Growth of AlGaSb Quantum Dots on the GaSb Substrate

Xenon plasma focused ion beam lamella fabrication on high-pressure frozen specimens for structural cell biology

On the fabrication of atom probe tomography specimens of Al alloys at room temperature using focused ion beam milling with liquid Ga ion source

Effective preparation of low-melting solder materials for atom probe tomography

Atomic layer deposited Al2O3 as a protective overlayer for focused ion beam preparation of plan-view STEM samples

XeF$_2$-Enhanced Focused Ion Beam Etching and Passivation of GaSb

Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

Using focus ion beam to prepare crystal lamella for electron diffraction.

Focused ion beam preparation of microbeams for in situ mechanical analysis of electroplated nanotwinned copper with probe type indenters

Composition Control of Electron Beam Induced Nanodeposits by Surface Pretreatment and Beam Focusing

In Situ Sputtering From the Micromanipulator to Enable Cryogenic Preparation of Specimens for Atom Probe Tomography by Focused-Ion Beam

Transmission Electron Microscope Specimen Preparation of Metal Matrix Composites Using the Focused Ion Beam Miller

Ti and Its Alloys As Examples of Cryogenic Focused Ion Beam Milling of Environmentally-Sensitive Materials

In Situ Metallic Coating of Atom Probe Specimen for Enhanced Yield, Performance, and Increased Field-of-View

Exceptional Surface Modifications of a Biodegradable Zn-Li-Cu Alloy in Electrolytes and under Ga-ion-beam Milling

High-quality TEM specimen preparation for lithium-ion conducting solid electrolytes by low-energy ion milling

In-situ metallic coating of atom probe specimen for enhanced yield, performance, and increased field-of-view