Parallel laser fabrication of electrically conductive graphitic columns in diamond

Marta Krueger,Martin J. Booth,Patrick S. Salter

DOI: https://doi.org/10.1364/oe.545109

IF: 3.8

2024-12-11

Optics Express

Abstract:Marta Krueger, Martin J. Booth, Patrick S. Salter An ultrashort pulsed laser focused beneath the surface of diamond can breakdown the lattice and induce graphite, and can hence be used for ... [Opt. Express 32, 46578-46585 (2024)]

optics

What problem does this paper attempt to address?

Directionality in Laser Fabrication of 3D Graphitic Microwires in Diamond

B. Sun,P. S. Salter,M. J. Booth

DOI: https://doi.org/10.1117/12.2212686

2016-01-01

Abstract:Graphitic wires embedded beneath the surface of single crystal diamond are promising for a variety of applications. Through a combination of ultrashort (femtosecond) pulsed fabrication, high numerical aperture focusing and adaptive optics, graphitic wires can be written along any 3D path. Here, we demonstrate a non-reciprocal directional dependence to the graphitization process: the features are distinct when the fabrication direction is reversed. The non-reciprocal effects are significantly determined by the laser power, the fabrication speed, the light polarization and pulse front tilt. The influences of these factors are studied.
High Conductivity Micro-Wires In Diamond Following Arbitrary Paths

bangshan sun,patrick s salter,martin j booth

DOI: https://doi.org/10.1063/1.4902998

IF: 4

2014-01-01

Applied Physics Letters

Abstract:High quality graphitic wires embedded beneath the surface of single crystal diamond are fabricated using a combination of adaptive ultrashort pulsed laser fabrication, high numerical aperture focusing, and an axial multi-fabrication scheme. Wires are created with micrometer and sub-micrometer dimensions that can follow any three dimensional path within the diamond. The measured conductivities are over an order of magnitude greater than previously reported wires fabricated by ultra-short pulsed lasers. The increased level of graphitization control in this scheme appears particularly important for fabrication of wires parallel to the diamond surface. (C) 2014 AIP Publishing LLC.
Growth of highly oriented graphite by ultraviolet nanosecond pulsed laser ablation of monocrystalline diamond

Liang Zhao,Chengwei Song,Junjie Zhang,Yandi Huang,Chunyu Zhang,Yuan Liu,Bing Dong,Zongwei Xu,Guo Li,Tao Sun

DOI: https://doi.org/10.1016/j.apsusc.2021.151995

IF: 6.7

2022-03-01

Applied Surface Science

Abstract:Inducing highly oriented graphite layer as buried conductive media in diamond by laser ablation is crucial for promoting the electronic functionalities of structured monocrystalline diamond. In the present work, we fabricate surface microgrooves with high precision and limited heat affected zone on monocrystalline diamond by low cost ultraviolet nanosecond pulsed laser micromachining. In particular, fruitful highly oriented graphite layer is formed between top transformed amorphous layer and bottom pristine diamond, with visible regular boundaries among them. Raman spectroscopy and high-resolution transmission electron microscopy characterization are jointly utilized to identify the phase transformation-induced microstructure evolution in subsurface of ablated diamond. Furthermore, molecular dynamics simulations are performed to elucidate the underlying ablation mechanisms, as well as predict the dynamic ablation process of nanosecond pulsed laser micromachining of diamond. Finally, the effect of laser fluence on the machined surface morphology and the phase transformation characteristics of the ablated diamond is addressed.

chemistry, physical,physics, applied, condensed matter,materials science, coatings & films
Bessel beam fabrication of graphitic micro electrodes in diamond using laser bursts

Akhil Kuriakose,Francesco P. Mezzapesa,Caterina Gaudiuso,Andrea Chiappini,Federico Picollo,Antonio Ancona,Ottavia Jedrkiewicz

2024-06-03

Abstract:We present the fabrication of conductive graphitic microelectrodes in diamond by using pulsed Bessel beams in the burst mode laser writing regime. The graphitic wires are created in the bulk of a 500 {\mu}m thick monocrystalline HPHT diamond (with (100) orientation) perpendicular to the sample surface, without beam scanning or sample translation. In particular, the role of different burst features in the resistivity of such electrodes is investigated for two very different sub-pulse durations namely 200 fs and 10 ps, together with the role of thermal annealing. Micro-Raman spectroscopy is implemented to investigate the laser-induced crystalline modification, and the results obtained by using two different laser repetition rates, namely 20 Hz and 200 kHz, are compared. A comparison of the micro-Raman spectra and of the resistivity of the electrodes fabricated respectively with 10 ps single pulses and with bursts (of sub-pulses) of similar total duration has also been made, and we show that the burst mode writing regime allows to fabricate more conductive micro electrodes, thanks to the heat accumulation process leading to stronger graphitization. Moreover, the microfabrication of diamond by means of the longest available bursts (~ 46.7 ps duration) featured by 32 sub-pulses of 200 fs duration, with intra-burst time delay of 1.5 ps (sub-THz bursts), leads to graphitic wires with the lowest resistivity values obtained in this work, especially at low repetition rate such as 20 Hz. Indeed, micro electrodes with resistivity on the order of 0.01 {\Omega} cm can be fabricated by Bessel beams in the burst mode regime even when the bursts are constituted by femtosecond laser sub-pulses, in contrast with the results of the standard writing regime with single fs pulses typically leading to less conductive micro electrodes.

Materials Science,Optics
Laser Direct Writing of Graphene Nanostructures Beyond the Diffraction Limit by Graphene Oxidation

Xiaodan Xu,Bin Shi,Xinzheng Zhang,Yang Liu,Wei Ca,Mengxin Ren,Xiaojie Jiang,Romano A. Rupp,Qiang Wu,Jingjun Xu

DOI: https://doi.org/10.1364/oe.26.020726

IF: 3.8

2018-01-01

Optics Express

Abstract:The fabrication ability of graphene nanostructures is the cornerstone of graphene-based devices, which are of particular interest because of their broad optical response and gate-tunable properties. Here, via laser-induced redox reaction of graphene and silica, we fabricate nano-scale graphene structures by femtosecond laser direct writing. The resolution of destructed graphene lines is far beyond the diffraction limit up to 100 nm with a precision as small as ± 7 nm. Consequently, graphene nanostructures are fabricated precisely and excellent plasmon responses are detected. This novel fabrication method of graphene nanostructures has the advantages of low costs, high efficiency, maskless and especially high precision, which would pave the way for practical application of graphene-based optical and electronic devices.
Fabrication and electrical characterization of three-dimensional graphitic microchannels in single crystal diamond

F Picollo,D Gatto Monticone,P Olivero,B A Fairchild,S Rubanov,S Prawer,E Vittone

DOI: https://doi.org/10.1088/1367-2630/14/5/053011

2012-05-09

New Journal of Physics

Abstract:We report on the systematic characterization of conductive micro-channels fabricated in single-crystal diamond with direct ion microbeam writing. Focused high-energy (∼MeV) helium ions are employed to selectively convert diamond with micrometric spatial accuracy to a stable graphitic phase upon thermal annealing, due to the induced structural damage occurring at the end-of-range. A variable-thickness mask allows the accurate modulation of the depth at which the microchannels are formed, from several μm deep up to the very surface of the sample. By means of cross-sectional transmission electron microscopy (TEM), we demonstrate that the technique allows the direct writing of amorphous (and graphitic, upon suitable thermal annealing) microstructures extending within the insulating diamond matrix in the three spatial directions, and in particular, that buried channels embedded in a highly insulating matrix emerge and electrically connect to the sample surface at specific locations. Moreover, by means of electrical characterization at both room temperature and variable temperature, we investigate the conductivity and the charge-transport mechanisms of microchannels obtained by implantation at different ion fluences and after subsequent thermal processes, demonstrating that upon high-temperature annealing, the channels implanted above a critical damage density convert into a stable graphitic phase. These structures have significant impact for different applications, such as compact ionizing radiation detectors, dosimeters, bio-sensors and more generally diamond-based devices with buried three-dimensional all-carbon electrodes.

physics, multidisciplinary
Effect of Crystallographic Orientation on the Potential Barrier and Conductivity of Bessel Written Graphitic Electrodes in Diamond

Akhil Kuriakose,Andrea Chiappini,Pietro Apra,Ottavia Jedrkiewicz

DOI: https://doi.org/10.1016/j.diamond.2023.110760

2024-01-05

Abstract:Ultrafast laser micromachining can be used to promote diamond graphitisation, enabling the creation of electrically conductive wires embedded in the diamond matrix. In this context, the presence of a potential barrier in the conductivity of transverse graphitic wires fabricated by pulsed Bessel beams without sample translation across 500 {\mu}m thick monocrystalline CVD diamond has been studied. In particular, the role of the crystallographic orientation has been analysed. The morphology and the conductivity of the obtained electrodes have been studied using optical microscopy and current-voltage measurements, while the structural changes have been investigated by means of micro-Raman spectroscopy. By using different laser writing parameters, we have explored the features of different electrodes in a (100) and a (110) oriented diamond crystal respectively. We show that in addition to the use of specific pulse energies and durations (in the fs and ps regimes), the crystallographic orientation of the sample plays an important role in reducing or eliminating the potential barrier height of the IV electrical characterization curves. In a (110) oriented sample, it is possible to eradicate the potential barrier completely even for graphitic wires fabricated at low pulse energy and in the fs pulse duration regime, in contrast to the (100) oriented-crystal case where the barrier is generally observed.

Optics,Materials Science
Direct fabrication of three-dimensional buried conductive channels in single crystal diamond with ion microbeam induced graphitization

P. Olivero,G. Amato,F. Bellotti,O. Budnyk,E. Colombo,M. Jaksic,A. Lo Giudice,C. Manfredotti,Z. Pastuovic,F. Picollo,N. Skukan,M. Vannoni,E. Vittone

DOI: https://doi.org/10.1016/j.diamond.2008.10.068

2016-08-26

Abstract:We report on a novel method for the fabrication of three-dimensional buried graphitic micropaths in single crystal diamond with the employment of focused MeV ions. The use of implantation masks with graded thickness at the sub-micrometer scale allows the formation of conductive channels which are embedded in the insulating matrix at controllable depths. In particular, the modulation of the channels depth at their endpoints allows the surface contacting of the channel terminations with no need of further fabrication stages. In the present work we describe the sample masking, which includes the deposition of semi spherical gold contacts on the sample surface, followed by MeV ion implantation. Because of the significant difference between the densities of pristine and amorphous or graphitized diamond, the formation of buried channels has a relevant mechanical effect on the diamond structure, causing localized surface swelling, which has been measured both with interferometric profilometry and atomic force microscopy. The electrical properties of the buried channels are then measured with a two point probe station: clear evidence is given that only the terminal points of the channels are electrically connected with the surface, while the rest of the channels extends below the surface. IV measurements are employed also to qualitatively investigate the electrical properties of the channels as a function of implantation fluence and annealing.

Materials Science
Laser Engineering Nanocarbon Phases within Diamond for Science and Electronics

Patrick S. Salter,M. Pilar Villar,Fernando Lloret,Daniel F. Reyes,Marta Krueger,Calum S. Henderson,Daniel Araujo,Richard B. Jackman

DOI: https://doi.org/10.1021/acsnano.3c07116

IF: 17.1

2024-01-19

ACS Nano

Abstract:Diamond, as the densest allotrope of carbon, displays a range of exemplary material properties that are attractive from a device perspective. Despite diamond displaying high carbon-carbon bond strength, ultrashort (femtosecond) pulse laser radiation can provide sufficient energy for highly localized internal breakdown of the diamond lattice. The less-dense carbon structures generated on lattice breakdown are subject to significant pressure from the surrounding diamond matrix, leading to highly...

materials science, multidisciplinary,chemistry, physical,nanoscience & nanotechnology
Inscription of 3D waveguides in diamond using an ultrafast laser

Arnaud Courvoisier,Martin J. Booth,Patrick S. Salter

DOI: https://doi.org/10.1063/1.4959267

2016-07-28

Abstract:Three dimensional waveguides within the bulk of diamond are manufactured using ultrafast laser fabrication. High intensities within the focal volume of the laser cause breakdown of the diamond into a graphitic phase leading to a stress induced refractive index change in neighboring regions. Type II waveguiding is thus enabled between two adjacent graphitic tracks, but supporting just a single polarization state. We show that adaptive aberration correction during the laser processing allows the controlled fabrication of more complex structures beneath the surface of the diamond which can be used for 3D waveguide splitters and Type III waveguides which support both polarizations.

Optics
Subtractive 3D printing of optically active diamond structures

Aiden A Martin,Milos Toth,Igor Aharonovich

DOI: https://doi.org/10.1038/srep05022

2014-05-21

Abstract:Controlled fabrication of semiconductor nanostructures is an essential step in engineering of high performance photonic and optoelectronic devices. Diamond in particular has recently attracted considerable attention as a promising platform for quantum technologies, photonics and high resolution sensing applications. Here we demonstrate the fabrication of optically active, functional diamond structures using gas-mediated electron beam induced etching (EBIE). The technique achieves dry chemical etching at room temperature through the dissociation of surface-adsorbed H2O molecules by energetic electrons in a water vapor environment. Parallel processing is possible by electron flood exposure and the use of an etch mask, while high resolution, mask-free, iterative editing is demonstrated by direct write etching of inclined facets of diamond microparticles. The realized structures demonstrate the potential of EBIE for the fabrication of optically active structures in diamond.
Highly Conductive Paths in Diamond and their Application in High Pressure Measurements

Mateusz Gramala,Andrzej Sikora,Aleksandra Chudzyńska,Łukasz Gelczuk,Filip Dybała,Paweł Modrzyński,Robert Kudrawiec

DOI: https://doi.org/10.1021/acsami.4c12113

IF: 9.5

2024-10-19

ACS Applied Materials & Interfaces

Abstract:Diamonds possess exceptional properties such as high mechanical strength, thermal conductivity, and electrical resistance, making them suitable for various applications, including high-power electronics and optoelectronics. However, fabricating conductive structures in diamond remains a significant technological challenge. In this publication, we present a controlled process for fabricating precise amorphous conductive paths in a monocrystalline diamond using a focused ion beam (FIB) technique....

materials science, multidisciplinary,nanoscience & nanotechnology
Study of Electrode Fabrication in Diamond with a Femto‐Second Laser

Ivan Lopez Paz,Olivier Allegre,Zhaoqing Li,Alexander Oh,Alice Porter,David Whitehead

DOI: https://doi.org/10.1002/pssa.201900236

2019-09-23

physica status solidi (a)

Abstract:<p>Diamond is a radiation hard material, which makes it suitable for its use in high energy physics experiments as particle detector. In order to further reduce the effects of radiation damage, the diamond detectors can be fabricated by inscribing graphitic electrodes perpendicular to the surface, the so called 3D detectors. This can be done via processing with a femto‐second laser. This work shows a systematic study of the cross section of the graphitic wires inscribed into diamond as a function of laser pulse energy, stage translational speed, and, for the first time, polarisation for a single crystal and poly‐crystalline CVD diamond samples. We observe no dependance of the electrode width with speed polarisation and sample for the same pulse energies within uncertainties. The graphitic content of the electrodes is studied in terms of Raman spectrometry: No clear dependance on the fabrication parameters studied is observed.</p><p>This article is protected by copyright. All rights reserved.</p>
Fabrication of micro-pillar with high aspect ratio on monocrystalline diamond by galvanometer-assisted femtosecond laser milling

Tianye Jin,Junyun Chen,Shengkang Zhang,Teng Zhao,Qingliang Zhao

DOI: https://doi.org/10.1016/j.jmapro.2020.10.055

IF: 5.684

2020-01-01

Journal of Manufacturing Processes

Abstract:Diamond micro/nano-pillar is widely applied in quantum transportation and nanomechanics, but it is very difficult to be machined by conventional mechanical methods, duo to its feature of high hardness, wear-proof and extremely small scale. Thus, a novel strategy of galvanometer-assisted femtosecond laser milling (GFM) was proposed to overcome the difficulty of fabricating the micro-pillar with high aspect ratio on monocrystalline diamond. Through numeric calculation, it is found that GFM trajectory possesses the special distribution consisting of separate pulse-concentrated regions and expanded flat-distributed region, which was then experimentally proved beneficial for improving the energy consumption and highly promoting the material removal rate. Moreover, the GFM was found to be much easier to generate micro-pillar, whereas in the case of conventional non-galvanometer milling (NGM) micro-pillar underwent severe degeneration or height loss under various average laser powers. Through optimizing the machining parameters, the micro-pillar was successfully prepared with an aspect ratio of as high as 42.25 by GFM. A 5 x 5 micro-pillar array of monocrystalline diamond was also fabricated with consistent diameter, height and aspect ratio. With Raman spectroscopy, the graphitization induced by GFM was slight, though it was unavoidably introduced with relatively high average laser power. Besides, the graphitizing level on the lateral face of the machined micro-pillar was found to non-linearly change with different machining parameters, because the material removal mode underwent a transformation from graphitization dominated to sublimation dominated with the increasing of applied energy density.
Raman Study of the Diamond to Graphite Transition Induced by the Single Femtosecond Laser Pulse on the (111) Face

Andrey A Khomich,Vitali Kononenko,Oleg Kudryavtsev,Evgeny Zavedeev,Alexander V Khomich

DOI: https://doi.org/10.3390/nano13010162

2022-12-29

Abstract:The use of the ultrafast pulse is the current trend in laser processing many materials, including diamonds. Recently, the orientation of the irradiated crystal face was shown to play a crucial role in the diamond to graphite transition process. Here, we develop this approach and explore the nanostructure of the sp2 phase, and the structural perfection of the graphite produced. The single pulse of the third harmonic of a Ti:sapphire laser (100 fs, 266 nm) was used to study the process of producing highly oriented graphite (HOG) layers on the (111) surface of a diamond monocrystal. The laser fluence dependence on ablated crater depth was analyzed, and three different regimes of laser-induced diamond graphitization are discussed, namely: nonablative graphitization, customary ablative graphitization, and bulk graphitization. The structure of the graphitized material was investigated by confocal Raman spectroscopy. A clear correlation was found between laser ablation regimes and sp2 phase structure. The main types of structural defects that disrupt the HOG formation both at low and high laser fluencies were determined by Raman spectroscopy. The patterns revealed give optimal laser fluence for the production of perfect graphite spots on the diamond surface.
Molecular dynamics simulation of laser-induced graphitization of CVD diamond

Xinrui Cui,Guo Li,Chunyu Zhang,Junjie Zhang,Liang Zhao,Chengwei Song,Yandi Huang,Haijun Zhang

DOI: https://doi.org/10.1117/12.2623957

2022-03-27

Abstract:Diamond material has been widely used in the manufacture of high performance optical components due to its excellent mechanical and optical properties. CVD diamond can be used as inertial confinement fusion (ICF) target, X-ray lens of the fourth-generation light source, and infrared window, etc. In order to achieve high quality manufacturing of CVD diamond components, laser-induced graphitization technology can be used to improve the machinability of CVD diamond surface. In this paper, the surface generation mechanism of CVD diamond under laser irradiation were studied by molecular dynamics (MD) simulation. Firstly, a model of polycrystalline CVD diamond under laser ablation was established to reveal removal and evolution of surface materials at the atomic level. The MD simulation results with different grain sizes under laser irradiation were compared, and the influence of grain boundaries and grain size on laser graphitization was determined. Finally, the laser machining processes of CVD diamond were simulated under different laser spot diameters, and the influence of laser area on the graphitization degree of CVD diamond surface was analyzed.
Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

R. Meyer,F. Stock,F. Antoni,F. Z. Lahboub,S. Hajjar-Garreau,D. Muller

DOI: https://doi.org/10.1007/s10854-023-10802-2

2023-06-18

Abstract:In the next years, one of the biggest challenges for optoelectronic devices will be the necessity to provide a suitable and reliable alternative to the use of transparent conducting oxide (TCO) like Indium Thin Oxide (ITO) as transparent electrodes. We recently demonstrated a promising fully laser-based method to produce transparent conductive electrodes only made of pure carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to synthetize high performance Diamond-Like Carbon (DLC), an amorphous pure carbon material composed of a mixture of sp 2 (graphitic) sp 3 (diamond) hybridized carbon atoms. DLC thin films show very interesting properties comparable to those of diamond, like a high transparency in the visible range, high wear resistance, biocompatibility, chemical inertness and high electrical insulation. DLC also presents one particularity compared to diamond which its relative high opacity in the UV range. This feature is used in a second step to perform an UV laser surface treatment to graphitize the very first atomic layers of the DLC thin film. DLC opacity at treatment wavelength will help to restrict the laser interaction at the surface and will break dominant diamond bindings, allowing carbon atoms to reorganize into its stable form, forming by their way a Thin Graphitic Layer (TGL). Raman spectroscopy (RS) and X-ray Photoemission Spectroscopy (XPS) perform before and after laser annealing clearly demonstrate the DLC surface graphitization kinetic. Transmittance and surface conductivity measurement show very promising results and performances that can clearly compete with those of ITO. In addition to all these analyses, this pure laser process will be fully compatible with standard microelectronic technological steps and will have a low ecological footprint compared to other much heavier processes.

engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
Experimental Parametric Investigation of Nanosecond Laser-Induced Surface Graphitization of Nano-Crystalline Diamond

Huixin Yuan,Liang Zhao,Junjie Zhang

DOI: https://doi.org/10.3390/ma17112704

IF: 3.4

2024-06-04

Materials

Abstract:While nano-crystalline diamond (NCD) is a promising engineering composite material for its unique mechanical properties, achieving the ultrahigh surface quality of NCD-based components through conventional grinding and polishing is challenging due to its exceptional hardness and brittleness. In the present work, we experimentally investigate the nanosecond laser ablation-induced graphitization characteristics of NCD, which provides a critical pretreatment method of NCD for realizing its superlative surface finish. Specifically, systematic experimental investigations of the nanosecond pulsed laser ablation of NCD are carried out, in which the characteristics of graphitization are qualitatively characterized by the Raman spectroscopy detection of the ablated area of the microhole and microgroove. Subsequently, the influence of laser processing parameters on the degree and morphological characteristics of graphitization is evaluated based on experimental data and related interpretation, from which optimized parameters for maximizing the graphitization of NCD are then identified. The findings reported in the current work provide guidance for promoting the machinability of NCD via laser irradiation-induced surface modification.

materials science, multidisciplinary,metallurgy & metallurgical engineering,physics, applied,chemistry, physical, condensed matter
Laser processing in 3D diamond detectors

S. Murphy,Mark Booth,Lin Li,A. Oh,Patrick S. Salter,Bangshan Sun,David Whitehead,Andrij Zadoroshnyj

DOI: https://doi.org/10.1016/j.nima.2016.04.052

2017-01-01

Abstract:A technique for electrode production within diamond using a femtosecond laser system is described. Diagnosis tests to quantify the stress, the diamond to graphite ratio, and the resistivity of these electrodes are discussed. A 3D electronic grade single crystal diamond detector produced using this technique is shown, and the electrodes have a resistivity of O(1Ωcm). An improvement to the technique through the use of an adaptive wavefront shows a reduction of the diamond to graphite ratio, and smaller, higher quality electrodes were manufactured.
Directly Tuning the Surface Morphologies and Electron Pathway of Graphite/diamond Composite Films for Enhanced Electron Field Emission

Wen Zhang,Lei Guan,Bing Wang,Huiqiang Liu,Jian Wang,Xiaofan Hong,Junjie Long,Shaobo Wei,Xiao Xiong,Ying Xiong

DOI: https://doi.org/10.1016/j.jallcom.2022.167243

IF: 6.2

2022-01-01

Journal of Alloys and Compounds

Abstract:Cathode electron field emitters are widely used in high-power and high-frequency vacuum electron devices. The development of novel technique to fabricate the emitters with high electron field emission performance has stimulated extensive research. Here we present a unique one-step microwave plasma chemical vapor deposition process to fabricate the graphite/diamond composite films. The gaseous methane is replaced by liquid n-butylamine, which acts as the single reactive carbon source. The components and surface morphologies of the graphite/diamond composite films can be effectively tuned upon changing the de-position temperatures. The vertically oriented graphite/diamond composite film with a graphite-diamond -graphite nanostructure is obtained and shows superior electron field emission performance of low turn-on field (E0 = 4.0 V/mu m) and high emission current density (J@8.8 V/mu m = 13.0 mA/cm(2)). Our study reveal that the sharp edges, appropriate distribution density of the nanosheets, as well as good electron pathway from the bulk to the surface are the key ingredients for the electron field emission performance. This work on graphite/diamond composite films provides a new carbon source instead of methane to fabricate the emitters with high electron field emission performance, which may promote the industrial-scale applica-tion. (c) 2022 Elsevier B.V. All rights reserved.

Parallel laser fabrication of electrically conductive graphitic columns in diamond

Directionality in Laser Fabrication of 3D Graphitic Microwires in Diamond

High Conductivity Micro-Wires In Diamond Following Arbitrary Paths

Growth of highly oriented graphite by ultraviolet nanosecond pulsed laser ablation of monocrystalline diamond

Bessel beam fabrication of graphitic micro electrodes in diamond using laser bursts

Laser Direct Writing of Graphene Nanostructures Beyond the Diffraction Limit by Graphene Oxidation

Fabrication and electrical characterization of three-dimensional graphitic microchannels in single crystal diamond

Effect of Crystallographic Orientation on the Potential Barrier and Conductivity of Bessel Written Graphitic Electrodes in Diamond

Direct fabrication of three-dimensional buried conductive channels in single crystal diamond with ion microbeam induced graphitization

Laser Engineering Nanocarbon Phases within Diamond for Science and Electronics

Inscription of 3D waveguides in diamond using an ultrafast laser

Subtractive 3D printing of optically active diamond structures

Highly Conductive Paths in Diamond and their Application in High Pressure Measurements

Study of Electrode Fabrication in Diamond with a Femto‐Second Laser

Fabrication of micro-pillar with high aspect ratio on monocrystalline diamond by galvanometer-assisted femtosecond laser milling

Raman Study of the Diamond to Graphite Transition Induced by the Single Femtosecond Laser Pulse on the (111) Face

Molecular dynamics simulation of laser-induced graphitization of CVD diamond

Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

Experimental Parametric Investigation of Nanosecond Laser-Induced Surface Graphitization of Nano-Crystalline Diamond

Laser processing in 3D diamond detectors

Directly Tuning the Surface Morphologies and Electron Pathway of Graphite/diamond Composite Films for Enhanced Electron Field Emission