Study of Electrode Fabrication in Diamond with a Femto‐Second Laser

Ivan Lopez Paz,Olivier Allegre,Zhaoqing Li,Alexander Oh,Alice Porter,David Whitehead
DOI: https://doi.org/10.1002/pssa.201900236
2019-09-23
physica status solidi (a)
Abstract:<p>Diamond is a radiation hard material, which makes it suitable for its use in high energy physics experiments as particle detector. In order to further reduce the effects of radiation damage, the diamond detectors can be fabricated by inscribing graphitic electrodes perpendicular to the surface, the so called 3D detectors. This can be done via processing with a femto‐second laser. This work shows a systematic study of the cross section of the graphitic wires inscribed into diamond as a function of laser pulse energy, stage translational speed, and, for the first time, polarisation for a single crystal and poly‐crystalline CVD diamond samples. We observe no dependance of the electrode width with speed polarisation and sample for the same pulse energies within uncertainties. The graphitic content of the electrodes is studied in terms of Raman spectrometry: No clear dependance on the fabrication parameters studied is observed.</p><p>This article is protected by copyright. All rights reserved.</p>
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