Laser processing in 3D diamond detectors

S. Murphy,Mark Booth,Lin Li,A. Oh,Patrick S. Salter,Bangshan Sun,David Whitehead,Andrij Zadoroshnyj

DOI: https://doi.org/10.1016/j.nima.2016.04.052

2017-01-01

Abstract:A technique for electrode production within diamond using a femtosecond laser system is described. Diagnosis tests to quantify the stress, the diamond to graphite ratio, and the resistivity of these electrodes are discussed. A 3D electronic grade single crystal diamond detector produced using this technique is shown, and the electrodes have a resistivity of O(1Ωcm). An improvement to the technique through the use of an adaptive wavefront shows a reduction of the diamond to graphite ratio, and smaller, higher quality electrodes were manufactured.