Measured optical losses of Sc doped AlN waveguides

B. Friedman,S. Barth,T. Schreiber,H. Bartzsch,J. Bain,G. Piazza
DOI: https://doi.org/10.1364/oe.511606
IF: 3.8
2024-01-31
Optics Express
Abstract:B. Friedman, S. Barth, T. Schreiber, H. Bartzsch, J. Bain, G. Piazza Although Sc doped AlN (ScAlN) has been used extensively in micro-electro-mechanical systems (MEMS) devices and more recently in optical ... [Opt. Express 32, 5252-5260 (2024)]
optics
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