Abstract:Programmable photonic integrated circuits (PICs) are emerging as powerful tools for the precise manipulation of light, with applications in quantum information processing, optical range finding, and artificial intelligence. The leading architecture for programmable PICs is the mesh of Mach-Zehnder interferometers (MZIs) embedded with reconfigurable optical phase shifters. Low-power implementations of these PICs involve micromechanical structures driven capacitively or piezoelectrically but are limited in modulation bandwidth by mechanical resonances and high operating voltages. However, circuits designed to operate exclusively at these mechanical resonances would reduce the necessary driving voltage from resonantly enhanced modulation as well as maintaining high actuation speeds. Here we introduce a synchronous, micromechanically resonant design architecture for programmable PICs, which exploits micromechanical eigenmodes for modulation enhancement. This approach combines high-frequency mechanical resonances and optically broadband phase shifters to increase the modulation response on the order of the mechanical quality factor $Q_m$, thereby reducing the PIC's power consumption, voltage-loss product, and footprint. The architecture is useful for broadly applicable circuits such as optical phased arrays, $1$ x $N$, and $N$ x $N$ photonic switches. We report a proof-of-principle programmable 1 x 8 switch with piezoelectric phase shifters at specifically targeted mechanical eigenfrequencies, showing a full switching cycle of all eight channels spaced by approximately 11 ns and operating at >3x average modulation enhancement across all on-chip modulators. By further leveraging micromechanical devices with high $Q_m$, which can exceed 1 million, our design architecture should enable a new class of low-voltage and high-speed programmable PICs.

Arbitrary Programming of Racetrack Resonators Using Low-Loss Phase-Change Material Sb 2 Se 3

Picosecond Optical Pulse Processing Using a Terahertz-Bandwidth Reconfigurable Photonic Integrated Circuit

Scalability of Large-Scale Photonic Integrated Circuits

Non-volatile electrically programmable integrated photonics with a 5-bit operation

Integrated Electro-Optic Control of Biphoton Generation Using Hybrid Photonics

Broadband nonvolatile electrically programmable silicon photonic switches

Synchronous micromechanically resonant programmable photonic circuits

Freeform direct-write and rewritable photonic integrated circuits in phase-change thin films

Non‐Volatile Reconfigurable Integrated Photonics Enabled by Broadband Low‐Loss Phase Change Material

Rewritable Photonic Integrated Circuit Canvas Based on Low-Loss Phase Change Material and Nanosecond Pulsed Lasers

Robust characterization of photonic integrated circuits

Ultra-compact nonvolatile plasmonic phase change modulators and switches with dual electrical-optical functionality

Ultracompact programmable silicon photonics using layers of low-loss phase-change material Sb$_2$Se$_3$ of increasing thickness

Magnetron-sputtered and Thermal-Evaporated Low-Loss Sb-Se Phase-Change Films in Non-Volatile Integrated Photonics

Nonvolatile Electrically Reconfigurable Silicon Photonics Enabled by Back-End-of-line Integration of Phase Change Materials

Low-loss multilevel operation using lossy PCM-integrated silicon photonics

Electro-optically programmable photonic circuits enabled by wafer-scale integration on thin-film lithium niobate

Rewritable photonic integrated circuits using dielectric-assisted phase-change material waveguides

Direct programming of confined surface phonon polariton resonators with the plasmonic phase-change material In3SbTe2

Low-power 7-bit hybrid volatile/ nonvolatile tuning of ring resonators