Abstract:Progress in superconducting device and detector technologies over the past decade have realized practical applications in quantum computers, detectors for far-infrared telescopes, and optical communications. Superconducting thin film materials, however, have remained largely unchanged, with aluminum still being the material of choice for superconducting qubits, and niobium compounds for high frequency/high kinetic inductance devices. Magnesium diboride ($\mathrm{MgB}_2$), known for its highest transition temperature ($\mathrm{T}_c$ = 39 K) among metallic superconductors, is a viable material for elevated temperature and higher frequency superconducting devices moving towards THz frequencies. However, difficulty in synthesizing wafer-scale thin films have prevented implementation of $\mathrm{MgB}_2$ devices into the application base of superconducting electronics. Here, we report ultra-smooth (< 0.5 nm root-mean-square roughness) and uniform $\mathrm{MgB}_2$ thin (< 100 nm) films over 100 mm in diameter for the first time and present prototype devices fabricated with these films demonstrating key superconducting properties including internal quality factor over $\mathrm{10}^4$ at 4.5 K and high tunable kinetic inductance in the order of tens of pH/sq in a 40 nm film. This groundbreaking advancement will enable development of elevated temperature, high frequency superconducting quantum circuits and devices.

Electrochemical synthesis of superconducting MgB2 thin films: a novel potential technique

Electroplating of superconducting films of MgB2 from molten salts

In Situ Epitaxial MgB2 Thin Films for Superconducting Electronics

Fabrication of superconducting magnesium diboride thin films by electron beam annealing

A sol-gel method for growing superconducting MgB2 films

GROWTH AND PROPERTIES OF SUPERCONDUCTING MgB_2 THIN FILM FABRICATED ON Al_2O_3 SUBSTRATE BY HYBRID PHYSICAL CHEMICAL VAPOR DEPOSITION

MgB2 superconductor thin films on Si and Al2O3 substrates

Highly crystalline superconducting MgB2 nanowires formed by electrodeposition

Hybrid Physical-Chemical Vapor Deposition of Ultrathin Mgb2 Films on Mgo Substrate with High T-C and J(C)

Ultrathin Epitaxial Mgb2 Superconducting Films with High Critical Current Density and T-C above 33 K

Film Fabrication and Electronic Devices of MgB2 Superconductor

Coating Thick MgB 2 Layer on Stainless Steel Substrate

Single-Step In-Situ Preparation Of Magnesium Diboride Superconducting Thin Films By Dc Magnetron Sputtering

Thin Film Magnesium Boride Superconductor with Very High Critical Current Density and Enhanced Irreversibility Field

Growth of MgB2 Thin Film Fabricated on Mg Substrate by Hybrid Physical-Chemical Vapor Deposition

Low-temperature synthesis of superconducting nanocrystalline MgB2

DUCTILITY OF SUPERCONDUCTING MgB2 THICK FILM FABRICATED ON STAINLESS STEEL SUBSTRATE BY HYBRID PHYSICAL CHEMICAL VAPOR DEPOSITION

Fabrication and Characterization of Superconducting MgB2 Thin Film on Graphene

MgB2 thick film with TC = 40.2 K deposited on sapphire substrate

Wafer-Scale MgB2 Superconducting Devices

Thermochemistry of MgB2 Thin Film Synthesis