Conductivity and photo-response of amorphous-LaAlO 3 /SrTiO 3 (001) grown by on-axis radio-frequency magnetron sputtering

Liqian Xiong,Yanpeng Hong,Haoran Chen,Yi Yang,Weijie Duan,Qingyan Rong,Qiao Chen,Yonghe Deng,Xiangli Zhong,Jinbin Wang
DOI: https://doi.org/10.1016/j.vacuum.2023.112840
IF: 4
2023-11-29
Vacuum
Abstract:LaAlO 3 /SrTiO 3 (LAO/STO) possesses many novel properties. To pursue its application in future electronic devices, studying of its mass production and controllability by external stimuli are indispensable. Here, we fabricate conducting amorphous-LAO/STO (001) ( a -LAO/STO) for the first time by on-axis radio-frequency (RF) magnetron sputtering. The properties of sputtered a -LAO/STO dependent strongly on growth parameters, with low electroconductibility but strong photo-response in samples sputtered at large target-to-substrate distance and/or under high Ar gas pressure. Using X-ray photoelectron spectroscopy (XPS) to investigate the film's stoichiometry, we find that this is related to Al deficiency (Al/La<1) in a -LAO among these samples. Our work demonstrates that sputtering is a feasible method for controllable, large-scale and low-cost fabrication of oxide interfaces.
materials science, multidisciplinary,physics, applied
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