Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Sub-nanometer scale depth patterning on sapphire crystal by femtosecond soft x-ray laser pulse irradiation

(Sub-)picosecond surface correlations of femtosecond laser excited Al-coated multilayers observed by grazing-incidence x-ray scattering

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation

A Method for Preparing Surface Sub-Microstructures on Sapphire Surfaces Using Femtosecond Laser Processing Technology

Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse

Processing Microstructure on Film by Femtosecond Laser

The influence of ultrafast temporal energy regulation on the morphology of Si surfaces through femtosecond double pulse laser irradiation

One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Material removal and surface formation mechanism of C-plane sapphire in multipass ablation by a nanosecond UV laser

Picosecond Laser Ablation of Millimeter-Wave Subwavelength Structures on Alumina and Sapphire

Creating extreme subsurface integrity by laser-induced material self-organization

Revealing Subsurface Damage Morphology and Patterns in areal Ultrashort Pulse Laser Machining of Glass

Crystalline Flat Surface Recovered by High-Temperature Annealing after Laser Ablation

Tailored engineering of crystalline surface enabled by ion-irradiation-assisted femtosecond laser ablation

Three-dimensional femtosecond laser nanolithography of crystals

Nanopatterning of the dielectric surface by a pair of femtosecond laser pulses of different colors through a monolayer of microspheres

Molecular dynamics study of the potential formation thickness of ultrafast laser induced sapphire crystal surface recast layer

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Effect of Different Etching Processes on Surface Defects of Quartz Crystals

Nanoscale subsurface dynamics of solids upon high-intensity laser irradiation observed by femtosecond grazing-incidence x-ray scattering

Sub-diffraction-limit fabrication of sapphire by femtosecond laser direct writing