Abstract:Precision glass molding is an efficient and promising technique for large-volume micro-optical manufacturing. Even though significant progress in precision glass molding has been achieved on the anti-adhesive coating, technical challenges and barriers still exist towards tailoring the coating layer to ensure durability and long-term processing consistency in numerous molding cycles. This manuscript presents a novel molding technique utilizing micro-patterned Si mold inserts coated with a newly developed nano-graphitic carbon coating as an isolation layer in high-precision glass molding. The coating is prepared by atmospheric pressure chemical vapor deposition (APCVD), in which the liquid benzene and silicone rubber are used as the carbon source and silicon oxycarbide (SiOC) source, respectively. The nano-morphologies of the nano-graphitic carbon coating with different conditions are characterized and analyzed, illustrating notable differences in surface features with the addition of silicone rubber and various growth durations. In the demonstration, the nano-graphitic carbon-coated Si mold inserts exhibit unique properties, including anti-adhesive and hydrophobic at elevated temperatures. Two kinds of micro-patterned Si mold inserts, a micro-pillar matrix and a micro-lens array, generated by UV lithography and diamond turning, are utilized to demonstrate the feasibility of the anti-adhesive coating in precision glass molding. The obtained results indicate that the micro-optical features on the coated Si mold inserts are successfully transferred to glass substrates with high replication fidelity without notable signs of adhesion or contamination in repetitive molding cycles. This emerging technology makes Si an alternative mold material with low surface adhesion, enhances micro-optical machining efficiency, and replicates high-precision, low-cost micro-optics on large scales that were previously unavailable.

Releasing Material for the Growth of Shaped Silicon Crystals

Material evaluation for engineering a novel crucible setup for the growth of oxygen free Czochralski silicon crystals

Amorphous Carbon Coated Silicon Wafer as Mold Insert for Precision Glass Molding

Study on nano-graphitic carbon coating on Si mold insert for precision glass molding

Water-Based Gelcasting of Surface-Coated Silicon Nitride Powder

Long-Term Stability of Novel Crucible Systems for the Growth of Oxygen-Free Czochralski Silicon Crystals

Processing strategy to trigger grain growth in silicon nitride

Effect of Sm2o3 Additives on the Rod-Like Beta-Si3n4 Crystal of Porous Silicon Nitride Fabricated by Reaction-Bonded

Silicon-Carbide Microfabrication by Silicon Lost Molding for Glass-Press Molds

Reduction of oxygen concentration in 300 mm diameter n-type Czochralski silicon crystal growth by optimized heating zone with dual side-heaters

Crystal Growth and Oxygen Precipitation Behavior of 300 Mm Nitrogen-Doped Czochralski Silicon

Preparation of high‐purity α‐Si3N4 powder via multifunctional synergistic catalysis and pretreatment method

Formation of moth-eye-like structures on silicon through in situ crystallization of layered Mg silicate

Numerical and experimental investigation on mc-Silicon growth process by varying the Si<sub>3</sub>N<sub>4</sub> coating thickness of crucible

Growth of Diamond Films on Si3n4 Coated Silicon Substrates

The Growth of Sic Crystals from Cosi Molten Alloy Fluxes

Synthesis and Growth Mechanism of Single Crystal Β‐si3n4 Particles with a Quasi‐spherical Morphology

Restraint of Nucleation of SiC Polycrystals Surrounding the Seed During SiC Single Crystal Growth

Synthesis of High Purity SiC Powder for High-resistivity SiC Single Crystals Growth