Abstract:Stitching interferometry is performed by collecting interferometric data from overlapped sub-apertures and stitching these data together to provide a full surface map. The propagation of the systematic error in the measured subset data is one of the main error sources in stitching interferometry for accurate reconstruction of the surface topography. In this work, we propose, using the redundancy of the captured subset data, two types of two-dimensional (2D) self-calibration stitching algorithms to overcome this issue by in situ estimating the repeatable high-order additive systematic errors, especially for the application of measuring X-ray mirrors. The first algorithm, called CS short for "Calibrate, and then Stitch", calibrates the high-order terms of the reference by minimizing the de-tilted discrepancies of the overlapped subsets and then stitches the reference-subtracted subsets. The second algorithm, called SC short for "Stitch, and then Calibrate", stitches a temporarily result and then calibrates the reference from the de-tilted discrepancies of the measured subsets and the temporarily stitched result. In the implementation of 2D scans in x- and y-directions, step randomization is introduced to generate nonuniformly spaced subsets which can diminish the periodic stitching errors commonly observed in evenly spaced subsets. The regularization on low-order terms enables a highly flexible option to add the curvature and twist acquired by another system. Both numerical simulations and experiments are carried out to verify the proposed method. All the results indicate that 2D high-order repeatable additive systematic errors can be retrieved from the 2D redundant overlapped data in stitching interferometry.

Stitching interferometry using Computer-Generated Hologram (CGH) based on sub-aperture adjustment aberration of 2-D Chebyshev polynomial

Elimination of reference surface error on high-accuracy subaperture stitching

Aspheric Subaperture Stitching Based on System Modeling.

Influence of Alignment Error and Random Noise on Interferometry Flat Sub-Aperture Stitching

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Non-null Annular Subaperture Stitching Interferometry for Aspheric Testing

Error Analysis of Spherical Scanning Mechanism Used for Surface Defects Detection

Sub-aperture Stitching Interference Measurement Method Based on Marker Location and Global Optimization

Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching

New Approach to Workpiece Localization in Subaperture Stitching Interferometric Testing

One-dimensional Stitching Interferometry Assisted by a Triple-Beam Interferometer.

Nonholonomic spherical stitching measurement method for large-aperture angles based on differential confocal precise surface fixation

Simple Method for the Implementation of Subaperture Stitching Interferometry

Lateral Location Error Compensation Algorithm for Measuring Aspheric Surfaces by Sub-Aperture Stitching Interferometry

Model analysis of sub-aperture stitching interferometry for aspheric surface test

Two-dimensional Stitching Interferometry for Self-Calibration of High-Order Additive Systematic Errors

Sub-aperture Stitching of Aspheric Surfaces in Precision In-Situ Measurement

Alignment error model of subaperture stitching interferometry for aspheric surface based on wavefront aberrations

In-situ Sub-Aperture Stitching Measurement Based on Monoscopic Phase Measuring Deflectometry

Two-dimensional Stitching Interferometry Based on Tilt Measurement.

Stitching interferometry using alternating calibration of positioning and systematic errors