Abstract:Extremely high accuracy is demanded for optics working at very short wavelength. Interferometric testing of optical aspheres or freeform surfaces requires null optics, typically computer-generated holograms (CGHs), to balance the wave aberrations. The measurement uncertainty is primarily limited by the accuracy of the test wavefront, which is predominantly influenced by the CGH and the interferometer optics. Absolute testing is fundamental to achieving accuracy much higher than that of the test wavefront through error separation. This paper presents a method for absolute testing of rotationally symmetric surfaces with CGH null optics. The basic assumption is that the off-axis hologram fabricated by raster scanning beam writing has negligible error of rotationally symmetric component due to pattern error of the CGH. Consequently, the wavefront error contributed by the CGH and the transmission flat can be completely separated from the absolute surface shape by combining the N-position method and the shift-rotation method. A theoretical model for absolute testing is proposed under the assumption. Experimental cross test is then presented to validate the method with sub-nanometer uncertainty. The assumption is further confirmed by characterizing the fabrication error of the hologram structures using a white light interferometer. Finally, the effect of noise, translation error, rotation error and eccentricity of rotation on the absolute testing is analyzed.

Using Computer-Generated Holograms to Test Cubic Surface

Problems on Design of Computer-Generated Holograms for Testing Aspheric Surfaces: Principle and Calculation

Computer Generated Hologram Null Test of A Freeform Optical Surface with Rectangular Aperture

Computer Generated Holograms Design in Null Testing of Optical Freeform Surfaces

Problems on Fabrication of Computer-Generated Holograms for Testing Aspheric Surfaces

Asphericity and Discrete Phase Calculation for Optical Freeform Surface Test with Computer Generated Holograms

Null Test of Aspheric Surface Based on Digital Phase-Shift Interferometer

Optimization of the Computer-Generated Hologram in Null Test of Sculptured Surface

Non-null Testing of the Aspheric Surface Using a Quadriwave Lateral Shearing Interferometer

Absolute Testing of Rotationally Symmetric Surfaces with Computer-Generated Holograms

Optical testing method and its experiment on freeform surface with computer-generated hologram

Deep Aspheric Surface Test Based on Combination of Computer Generated Holograms with Low Spatial Frequency

Design and Parameter Calculation of Circular Computer Generated Holograms

Design and Fabrication of Computer-Generated Holograms for Testing Optical Freeform Surfaces

Null Compensator Testing Convex Freeform Surface Mirror with CGH Technology

Analysis for Property of CGH on Spherical Surface Used for Aspheric Surface Testing

Measurement of Convex Aspheric Lens' Optical Performance Using Computer-Generated Holograms

Absolutely Testing of Off-Axis Aspherical Mirror Using Dichotomy Computer-Generated Holograms

New Design Techniques and Alignment Methods for Cgh-Null Testing of Aspheric Surface

Fringe Discretization and Manufacturing Analysis of a Computer-Generated Hologram in a Null Test of the Freeform Surface.

Use of Virtual Medium in Designing of the CGH Wave Front Generator for Aspheric Testing