Abstract:Extremely high accuracy is demanded for optics working at very short wavelength. Interferometric testing of optical aspheres or freeform surfaces requires null optics, typically computer-generated holograms (CGHs), to balance the wave aberrations. The measurement uncertainty is primarily limited by the accuracy of the test wavefront, which is predominantly influenced by the CGH and the interferometer optics. Absolute testing is fundamental to achieving accuracy much higher than that of the test wavefront through error separation. This paper presents a method for absolute testing of rotationally symmetric surfaces with CGH null optics. The basic assumption is that the off-axis hologram fabricated by raster scanning beam writing has negligible error of rotationally symmetric component due to pattern error of the CGH. Consequently, the wavefront error contributed by the CGH and the transmission flat can be completely separated from the absolute surface shape by combining the N-position method and the shift-rotation method. A theoretical model for absolute testing is proposed under the assumption. Experimental cross test is then presented to validate the method with sub-nanometer uncertainty. The assumption is further confirmed by characterizing the fabrication error of the hologram structures using a white light interferometer. Finally, the effect of noise, translation error, rotation error and eccentricity of rotation on the absolute testing is analyzed.

Deep Aspheric Surface Test Based on Combination of Computer Generated Holograms with Low Spatial Frequency

Problems on Design of Computer-Generated Holograms for Testing Aspheric Surfaces: Principle and Calculation

Measurement of Aspheric Surface

Null Test of Aspheric Surface Based on Digital Phase-Shift Interferometer

Non-null Testing of the Aspheric Surface Using a Quadriwave Lateral Shearing Interferometer

Research on Two Optical Methods for Aspheric Measurement

Using Computer-Generated Holograms to Test Cubic Surface

The Position Shifting of Frequency Spectrum of Fourier Transform in the Application of Aspheric Surface Testing

Low Noisy Dual Wavelength Digital Holography and Application in the Ultra-precision Machining Surface Measurement

Problems on Fabrication of Computer-Generated Holograms for Testing Aspheric Surfaces

Asphericity and Discrete Phase Calculation for Optical Freeform Surface Test with Computer Generated Holograms

Measurement of Convex Aspheric Lens' Optical Performance Using Computer-Generated Holograms

Analysis for Property of CGH on Spherical Surface Used for Aspheric Surface Testing

New Design Techniques and Alignment Methods for Cgh-Null Testing of Aspheric Surface

Investigation of Measurement Uncertainty of Aspheric Surface Based on Null-Computer-Generated Holography

Measurement of steep aspheric surfaces using improved two-wavelength phase-shifting interferometer

Use of Virtual Medium in Designing of the CGH Wave Front Generator for Aspheric Testing

Absolute Testing of Rotationally Symmetric Surfaces with Computer-Generated Holograms

Measurement Investigation of an Off-Axis Aspheric Surface Via a Hybrid Compensation Method.

The Research of Basing on Simulative Compensator and Two-Wavelength Phase Shifting Interferometry for Testing Large Departure Aspheric Surface

Design and Parameter Calculation of Circular Computer Generated Holograms