Reconstruction of the doping profile in Vlasov-Poisson system

Ru-Yu Lai,Qin Li,Weiran Sun
DOI: https://doi.org/10.1088/1361-6420/ad7c78
IF: 2.408
2024-09-20
Inverse Problems
Abstract:We study the inverse problem of recovering the doping profile in the stationary Vlasov-Poisson equation, given the knowledge of the incoming and outgoing measurements at the boundary of the domain. This problem arises from identifying impurities in the semiconductor manufacturing. Our result states that, under suitable assumptions, the doping profile can be uniquely determined through an asymptotic formula of the electric field that it generates.
mathematics, applied,physics, mathematical
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