Abstract:Recent trends of interferometric wavefront sensing tend to focus on high precision, anti-vibration, compact, along with much more involved of electric and computer technology. And the optical principles employed not only limit to interference but also include diffraction, scattering, polarization, etc. In this paper, some selected examples basing on the research works in our group will be given to illustrate the trends mentioned above. To achieve extra high accuracy, phase-shifting point diffraction interferometry (PS-PDI) is believed to be a good candidate as it employs a nearly perfect point diffraction spherical wavefront as the reference and also takes advantage of the high precision of phase-shifting algorithms. Cyclic radial shearing interferometry (C-RSI) successively demonstrate the anti-vibration characteristic and can diagnose transient wavefront with only one single shot by employing a three-mirror common-path configuration and a synchronizing system. In contrast sharply with those early interferometers, interferometers with very compact configuration are more suitable to develop portable wavefront sensing instruments. Cross-grating lateral shearing interferometer (CG-LSI) is a very compact interferometer that adopts a cross-grating of millimeters to produce lateral shearing of the diffraction wave of the test wavefront. Be aware that, computer technique has been used a lot in all of the above interferometers but the non-null annual sub-aperture stitching interferometer (NASSI) for general aspheric surface testing mostly relies on the computer model of the physical interferometer setup and iterative ray-tracing optimization. The principles of the above mentioned interferometric wavefront sensing methods would be given in detail.

Lateral shearing interferometry method based on double-checkerboard grating by suppressing aliasing effect

Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

A Novel Method to Simultaneously Measure the Straightness

Multi-Directional Lateral Shearing Interferometer Based on Rotatable Prism Pairs

Common-path and compact wavefront diagnosis system based on cross grating lateral shearing interferometer.

Interferometry Measurement Of Parallel Optical Plate Wavefront

Quadriwave Lateral Shearing Interferometer Based on a Randomly Encoded Hybrid Grating.

A new shack-hartmann type wavefront sensor using liquid crystal panels

Off-axis Cyclic Radial Shearing Interferometer for Measurement of Centrally Blocked Transient Wavefront.

Single-shot reflective shearing point diffraction interferometer for wavefront measurements.

Recent Developments of Interferometric Wavefront Sensing

System Optimization of Radial Shearing Interferometer for Aspheric Testing

Scanning Interferometric Method for Measuring Group Delay of Dispersive Mirrors

Two-dimensional Surface Profile Imaging Technique Based on a Double-Grating Frequency Shifter

Non-null Testing of the Aspheric Surface Using a Quadriwave Lateral Shearing Interferometer

Influences of Misalignment Errors of Optical Components in an Orthogonal Two-Axis Lloyd's Mirror Interferometer.

Wave-Front Reconstruction For Lateral Shearing Interferometers With Big Shear

General Measurement of Optical System Aberrations with a Continuously Variable Lateral Shear Ratio by a Randomly Encoded Hybrid Grating

In situ calibration of shear ratio for quadriwave lateral shearing interferometry using double-slit interference

Two-frame wavefront reconstruction method with nonlinear optimization for Ronchi lateral shearing interferometry

Two-Dimensional Wavefront Reconstruction of Shearing Interferograms with Big Shears