Abstract:Recent trends of interferometric wavefront sensing tend to focus on high precision, anti-vibration, compact, along with much more involved of electric and computer technology. And the optical principles employed not only limit to interference but also include diffraction, scattering, polarization, etc. In this paper, some selected examples basing on the research works in our group will be given to illustrate the trends mentioned above. To achieve extra high accuracy, phase-shifting point diffraction interferometry (PS-PDI) is believed to be a good candidate as it employs a nearly perfect point diffraction spherical wavefront as the reference and also takes advantage of the high precision of phase-shifting algorithms. Cyclic radial shearing interferometry (C-RSI) successively demonstrate the anti-vibration characteristic and can diagnose transient wavefront with only one single shot by employing a three-mirror common-path configuration and a synchronizing system. In contrast sharply with those early interferometers, interferometers with very compact configuration are more suitable to develop portable wavefront sensing instruments. Cross-grating lateral shearing interferometer (CG-LSI) is a very compact interferometer that adopts a cross-grating of millimeters to produce lateral shearing of the diffraction wave of the test wavefront. Be aware that, computer technique has been used a lot in all of the above interferometers but the non-null annual sub-aperture stitching interferometer (NASSI) for general aspheric surface testing mostly relies on the computer model of the physical interferometer setup and iterative ray-tracing optimization. The principles of the above mentioned interferometric wavefront sensing methods would be given in detail.

Two-Dimensional Wavefront Reconstruction of Shearing Interferograms with Big Shears

Wave-Front Reconstruction For Lateral Shearing Interferometers With Big Shear

Two-Dimensional Wave-Front Reconstruction From Lateral Shearing Interferograms

Infinite element model for the reconstruction of two-dimensional shearing wavefront

Two-dimensional Wavefront Reconstruction Based on Double-shearing and Least Squares Fitting

Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

Recovery of wavefront from multi-shear interferograms with different tilts.

Simultaneous Reconstruction of Phase and Amplitude for Wavefront Measurements Based on Nonlinear Optimization Algorithms

Modal-based Nonlinear Optimization Algorithm for Wavefront Measurement with Under-Sampled Data.

System Optimization of Radial Shearing Interferometer for Aspheric Testing

Two-Dimensional Structural Surface Measurement Based On Spectrally Resolved White-Light Interferometry

Wavefront restoration from lateral shearing data using spectral interpolation

Modal Wavefront Reconstruction in Rotational Shearing Interferometer by Zernike Polynomials

Fourier Modal Method for Two-Dimensional Wavefront Reconstruction

Generalized Phase-Shifting for Three-Wave Shearing Interferometry

Aspherical Surface Wavefront Testing Based on Multi-Directional Orthogonal Lateral Shearing Interferometry

Two-frame wavefront reconstruction method with nonlinear optimization for Ronchi lateral shearing interferometry

The Comparisons Between The Preconditioned Conjugate-Gradient Method And The Fourier Transform Method In Lateral Shearing Interferometry

Wavenumber-Domain Fast Reconstruction Technique Using Ultrasonic Scanning for Transverse Wave Imaging

Lateral shearing interferometry method based on double-checkerboard grating by suppressing aliasing effect

Recent Developments of Interferometric Wavefront Sensing