Full Activation of Dopants by Carbon-free Self-Assembled Molecular Monolayer Doping

Kai Li,Jie-Yin Zhang,Shannan Chang,Hao Wei,Jian-Jun Zhang,Yaping Dan
DOI: https://doi.org/10.1021/acsaelm.1c00276
IF: 4.494
2021-08-02
ACS Applied Electronic Materials
Abstract:Self-assembled molecular monolayer doping may find important applications in doping FinFET and nanowire transistors due to its nature of being conformal, nondestructive, and self-limiting. However, carbon contamination from the dopant carrier molecules is often introduced into silicon, which will affect the device performance. Herein, we use carbon-free phosphorus chloride (PCl3) molecules as dopant carrier molecules to avoid the introduction of carbon contamination. The Hall effect measurements and secondary ion mass spectrometry show that the dopant activation rate is close to full activation even for samples with a low doping concentration.The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsaelm.1c00276.XPS spectra of blank and doped samples, AFM images of doped samples, schematic diagram of the sheet resistance test, I–V curves of samples, Hall effect measurements, and SIMS profile of phosphorus dopants and carbon impurities (PDF)This article has not yet been cited by other publications.
materials science, multidisciplinary,engineering, electrical & electronic
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