Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture

Ye Wan,Wenhui Guo,Jin Xiao,Dazhou Yan,Xiong Zhao,Shuhu Guo,Jianhua Liu,Qifan Zhong,Tao Yang,Yu Zhao,Xin Chang,Xin Gao
DOI: https://doi.org/10.1016/j.cjche.2020.06.023
IF: 3.8
2020-09-01
Chinese Journal of Chemical Engineering
Abstract:Ultra-high-purity silicon tetrachloride (SiCl<sub>4</sub>) is demanded as an electronic-grade chemical to meet the stringent requirements of the rapidly developing semiconductor industry. The high requirement for ultra-high-purity SiCl<sub>4</sub> has created the need for a high-efficient process for reducing energy consumption as well as satisfying product quality. In this paper, a mass of production technology of ultra-high-purity SiCl<sub>4</sub> was successfully developed through chlorination reaction in the ultraviolet (UV)-based photo microreactor coupled with the distillation process. The influences of key operational parameters, including temperature, pressure, UV wavelength and light intensity on the product quality, especially for hydrogen-containing impurities, were quantified by the infrared transmittance of Fourier transform infrared spectroscopy (FT-IR) at 2185 cm<sup>-1</sup> and 2160 cm<sup>-1</sup> indicating characteristic vibrational modes of Si-H bonds, as well as the operating conditions of distillation were also investigated as key factors for metal impurities removing. The advanced intensification of SiCl<sub>4</sub> manufactured by the integration of photo microreactor and distillation achieves the products with superior specifications higher than the standard commercial products.<span class="display"><span><ol class="links-for-figure"><li><a class="anchor download-link u-font-sans" href="https://ars.els-cdn.com/content/image/1-s2.0-S1004954120303128-ga1_lrg.jpg"><span class="anchor-text">Download : <span class="download-link-title">Download high-res image (93KB)</span></span></a></li><li><a class="anchor download-link u-font-sans" href="https://ars.els-cdn.com/content/image/1-s2.0-S1004954120303128-ga1.jpg"><span class="anchor-text">Download : <span class="download-link-title">Download full-size image</span></span></a></li></ol></span></span>
engineering, chemical
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