Study on Process Parameters of Magnetron Sputtering Titanium Coating in Deep Porous Structures

Yunze Han,Sijie Li,Xue Li,Junping Ma,Jiehong Ping,Yuhua Sun
DOI: https://doi.org/10.1021/acsomega.4c00540
IF: 4.1
2024-04-02
ACS Omega
Abstract:In order to improve the energy conversion efficiency and power density of the tritium-powered betavoltaic battery, titanium was deposited on the inner surface of the deep porous three-dimensional structure semiconductor as a tritium absorption material. Therefore, magnetron sputtering technology was used to explore the parameters of titanium coating on the inner surface of a deep porous semiconductor. First, the effects of argon pressure and sputtering power on the properties of titanium films...
chemistry, multidisciplinary
What problem does this paper attempt to address?