Improved Three-Dimensional Reconstructions in Electron Ptychography through Defocus Series Measurements

Marcel Schloz,Thomas C. Pekin,Hamish G. Brown,Dana O. Byrne,Bryan D. Esser,Emmanuel Terzoudis-Lumsden,Takashi Taniguchi,Kenji Watanabe,Scott D. Findlay,Benedikt Haas,Jim Ciston,Christoph T. Koch

2024-06-03

Abstract:A detailed analysis of ptychography for 3D phase reconstructions of thick specimens is performed. We introduce multi-focus ptychography, which incorporates a 4D-STEM defocus series to enhance the quality of 3D reconstructions along the beam direction through a higher overdetermination ratio. This method is compared with established multi-slice ptychography techniques, such as conventional ptychography, regularized ptychography, and multi-mode ptychography. Additionally, we contrast multi-focus ptychography with an alternative method that uses virtual optical sectioning through a reconstructed scattering matrix ($\mathcal{S}$-matrix), which offers more precise 3D structure information compared to conventional ptychography. Our findings from multiple 3D reconstructions based on simulated and experimental data demonstrate that multi-focus ptychography surpasses other techniques, particularly in accurately reconstructing the surfaces and interface regions of thick specimens.

Optics,Materials Science,Computational Physics

What problem does this paper attempt to address?

The paper attempts to address the challenges encountered in 3D phase reconstruction of thick samples in electron ptychography. Specifically:

1. **Thickness Limitation Issue**: Traditional single-slice ptychography methods become unreliable when dealing with samples thicker than the depth of field (DOF) of the electron beam. This is mainly because the single-slice model assumes that the probe interacts with the sample on an infinitely thin plane, an assumption that no longer holds for thick samples.

2. **Limitations of Multi-slice Ptychography**: Although multi-slice ptychography can handle thick samples, its depth resolution is relatively low, especially when applied to experimental data, facing more challenges.

To address these issues, the paper proposes a **multi-focus ptychography** method, which enhances the quality of 3D reconstruction by combining datasets from 4D-STEM with different focal lengths. This method not only improves the reconstruction accuracy along the optical axis but also overcomes the resolution degradation encountered in single-slice or multi-slice ptychography for thick samples. By comparing with existing multi-slice ptychography techniques (such as conventional, regularized, and multi-mode) and scattering matrix (S-matrix) based methods, the superiority of multi-focus ptychography in accurately reconstructing the surface and interface regions of thick samples is demonstrated.