Improved Three-Dimensional Reconstructions in Electron Ptychography through Defocus Series Measurements
Marcel Schloz,Thomas C. Pekin,Hamish G. Brown,Dana O. Byrne,Bryan D. Esser,Emmanuel Terzoudis-Lumsden,Takashi Taniguchi,Kenji Watanabe,Scott D. Findlay,Benedikt Haas,Jim Ciston,Christoph T. Koch
2024-06-03
Abstract:A detailed analysis of ptychography for 3D phase reconstructions of thick specimens is performed. We introduce multi-focus ptychography, which incorporates a 4D-STEM defocus series to enhance the quality of 3D reconstructions along the beam direction through a higher overdetermination ratio. This method is compared with established multi-slice ptychography techniques, such as conventional ptychography, regularized ptychography, and multi-mode ptychography. Additionally, we contrast multi-focus ptychography with an alternative method that uses virtual optical sectioning through a reconstructed scattering matrix ($\mathcal{S}$-matrix), which offers more precise 3D structure information compared to conventional ptychography. Our findings from multiple 3D reconstructions based on simulated and experimental data demonstrate that multi-focus ptychography surpasses other techniques, particularly in accurately reconstructing the surfaces and interface regions of thick specimens.
Optics,Materials Science,Computational Physics