Abstract:Bulk Acoustic Wave (BAW) filters find applications in radio frequency (RF) communication systems for Wi-Fi, 3G, 4G, and 5G networks. In the beyond-5G (potential 6G) era, high frequency bands (>8 GHz) are expected to require resonators with high-quality factor (Q) and electromechanical coupling (k_t^2) to form filters with low insertion loss and high selectivity. However, both the Q and k_t^2 of resonator devices formed in traditional uniform polarization piezoelectric films of aluminum nitride (AlN) and aluminum scandium nitride (AlScN) decrease when scaled beyond 8 GHz. In this work, we utilized 4-layer AlScN periodically poled piezoelectric films (P3F) to construct high frequency (~17-18 GHz) resonators and filters. The resonator performance is studied over a range of device geometries, with the best resonator achieving a k_t^2 of 11.8% and a Q_p of 236.6 at the parallel resonance frequency (fp) of 17.9 GHz. These resulting figures of merit are ((FoM)_1=(k_t^2 Q)_p and (FoM_2=f_p(FoM)_1x10^-9) ) 27.9 and 500 respectively. These and the k_t^2 are significantly higher than previously reported An/AlScN-based resonators operating at similar frequencies. Fabricated 3-element and 6-element filters formed from these resonators demonstrated low insertion losses (IL) of 1.86 dB and 3.25 dB, and -3 dB bandwidths (BW) of 680 MHz (fractional BW of 3.9%) and 590 MHz (fractional BW of 3.3%) at ~17.4 GHz center frequency. The 3-element and 6-element filters achieved excellent linearity with in-band input third-order intercept point (IIP3) values of +36 dBm and +40 dBm, respectively, which are significantly higher than previously reported acoustic filters operating at similar frequencies.

23.8-GHz Acoustic Filter in Periodically Poled Piezoelectric Film Lithium Niobate With 1.52-dB IL and 19.4% FBW

Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz with 2.38 dB IL and 18.2% FBW

38.7 GHz Thin Film Lithium Niobate Acoustic Filter

Transferred Thin Film Lithium Niobate as Millimeter Wave Acoustic Filter Platforms

Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k2 of 5.1% at 50.74 GHz

Hybrid Integration of BAW Resonators with an On-Chip Inductor to Improve the Stopband Rejection of the N78 Band Filter

Monolithic 1–6-Ghz Multiband Acoustic Filters Using SH-SAW and LLSAW on LiNbO$_{3}$/SiO$_{2}$/SiC Platform

Fundamental Antisymmetric Mode Acoustic Resonator in Periodically Poled Piezoelectric Film Lithium Niobate

Enhancement of high-frequency harmonics in resonators using multilayered structures with polarity-inverted layers

Lithium Niobate Piezoelectric Actuator-Integrated Fiber Fabry-Pérot Tunable Filter with Ultrahigh Speed and Linearity

Nanosheet Lithium Niobate Acoustic Resonator for Mmwave Frequencies

Flexible Film Bulk Acoustic Wave Filter Based on Poly(vinylidene fluoride-trifluorethylene)

Periodically Poled Aluminum Scandium Nitride Bulk Acoustic Wave Resonators and Filters for Communications in the 6G Era

Ultra flexible pseudo-lamb wave RF resonators based on ZnO/PI and AlN/PI structures

Wide Band BAW Filter Based on Single-Crystalline LiNbO₃ Thin Film with Insulating Bragg Reflector

Large Coupling and Spurious-Free SH 0 Plate Acoustic Wave Resonators Using LiNbO 3 Thin Film

6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

Near 6-Ghz Longitudinal Leaky SAW Filters with Spurious Mitigation on LiNbO3/SiO2/SiC Platform

Layered LiNbO $_{3}$ /At-Quartz Wideband Devices with Inherent Transverse Mode Suppression

A Highly Selective and Compact SAW Filter with Cascaded DMSs

Lithium niobate single crystal thin film resonator with benzocyclobutene as a reflective layer