Abstract:High-performance filter is currently a critical component for radio frequency (RF) front-end modules, and piezoelectric on insulator – surface acoustic wave (POI-SAW) is gradually becoming the mainstream implementation form due to its good electromechanical coupling coefficient and high quality factor (Q). Based on the 50°Y-X LiTaO 3 /SiO 2 /Si substrate, a highly selective SAW filter is designed and fabricated, which is mainly composed of two cascaded double-mode SAWs (DMSs) and a series resonator. The tilted interdigital-transducer (IDT) is used to suppress the transverse modes, and the tilt angle is 8 degrees. The center frequency of the filter is 1059 MHz. The relative bandwidth is 1.7%. The out-of-band rejection can reach 40dB, and the active chip area is 1mm×0.4mm. The filter is fabricated, packaged and finally tested by means of wire bonding. The measured results are consistent with the simulation results.

A Highly Selective and Compact SAW Filter with Cascaded DMSs