Ultra-high-ohmic microstripline resistors for Coulomb blockade devices

Sergey V Lotkhov
DOI: https://doi.org/10.1088/0957-4484/24/23/235201
IF: 3.5
2013-06-14
Nanotechnology
Abstract:In this paper, we report on the fabrication and low-temperature characterization of ultra-high-ohmic microstripline resistors made of a thin film of weakly oxidized titanium. Nearly linear voltage-current characteristics were measured at temperatures down to T ~ 20 mK for films with sheet resistivities as high as ~7 kΩ, i.e. about an order of magnitude higher than our previous findings for weakly oxidized Cr. Our analysis indicates that such an improvement can help to create an advantageous high-impedance environment for different Coulomb blockade devices. Further properties of the Ti film addressed in this work show the promise of low-noise behavior of the resistors when applied in different realizations of the quantum standard of current.
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