FDTD-based optical simulations methodology for CMOS image sensors pixels architecture and process optimization

Flavien Hirigoyen,Axel Crocherie,Jérôme Vaillant,Yvon Cazaux

DOI: https://doi.org/10.1117/12.766391

2023-10-16

Abstract:This paper presents a new FDTD-based optical simulation model dedicated to describe the optical performances of CMOS image sensors taking into account diffraction effects. Following market trend and industrialization constraints, CMOS image sensors must be easily embedded into even smaller packages, which are now equipped with auto-focus and short-term coming zoom system. Due to miniaturization, the ray-tracing models used to evaluate pixels optical performances are not accurate anymore to describe the light propagation inside the sensor, because of diffraction effects. Thus we adopt a more fundamental description to take into account these diffraction effects: we chose to use Maxwell-Boltzmann based modeling to compute the propagation of light, and to use a software with an FDTD-based (Finite Difference Time Domain) engine to solve this propagation. We present in this article the complete methodology of this modeling: on one hand incoherent plane waves are propagated to approximate a product-use diffuse-like source, on the other hand we use periodic conditions to limit the size of the simulated model and both memory and computation time. After having presented the correlation of the model with measurements we will illustrate its use in the case of the optimization of a 1.75$\mu$m pixel.

Optics,Instrumentation and Detectors

What problem does this paper attempt to address?

The problem that this paper attempts to solve is that during the miniaturization of CMOS image sensors, as the pixel size is reduced to close to the visible - light diffraction limit (about 3μm), the traditional ray - tracing model cannot accurately describe the propagation characteristics of light within the pixel, especially the influence of the diffraction effect. Specifically:

1. **Limitations of the traditional ray - tracing model**: As the pixel size decreases, the traditional ray - tracing model (based on the principles of geometric optics, such as Snell - Descartes' law and Beer - Lambert law) can no longer accurately simulate the propagation behavior of light within the pixel, especially in describing the diffraction effect. This has led to differences between simulation results and actual measurement results, especially for pixel sizes below 3μm.

2. **Introduction of electromagnetic simulation methods**: To overcome the above limitations, the author proposes an optical simulation method based on the finite - difference time - domain method (FDTD). This method describes the propagation of light by solving the Maxwell - Boltzmann equation and can more accurately consider the diffraction effect, thereby improving the accuracy of the simulation.

3. **Optimization of pixel architecture and process**: Through this new simulation method, researchers can more accurately evaluate and optimize the pixel architecture and manufacturing process of CMOS image sensors to improve photon collection efficiency and overall performance.

In summary, the main purpose of this paper is to develop a new optical simulation method to meet the challenges brought by the miniaturization of CMOS image sensors, especially how to accurately simulate the propagation characteristics of light at sub - 3μm pixel sizes.