Abstract:Monocrystalline silicon (c-Si) is still an important material related to microelectronics/optoelectronics. The nondestructive measurement of the c-Si material and its microstructure is commonly required in scientific research and industrial applications, for which Raman spectroscopy is an indispensable method. However, Raman measurements based on the specific fixed Raman geometry/polarization configuration are limited for the quantified analysis of c-Si performance, which makes it difficult to meet the high-end requirements of advanced silicon-based microelectronics and optoelectronics. Angle-resolved Raman measurements have become a new trend of experimental analysis in the field of materials, physics, mechanics, and optics. In this paper, the characteristics of the angle-resolved polarized Raman scattering of c-Si under the in-axis and off-axis configurations are systematically analyzed. A general theoretical model of the angle-resolved Raman intensity is established, which includes several alterable angle parameters, including the inclination angle, rotation angle of the sample, and polarization directions of the incident laser and scattered light. The diversification of the Raman intensity is given at different angles for various geometries and polarization configurations. The theoretical model is verified and calibrated by typical experiments. In addition, this work provides a reliable basis for the analysis of complex polarized Raman experiments on silicon-based structures.

Measurement of nonreciprocal spontaneous Raman scattering in silicon photonic wires

Spontaneous Raman scattering in ultrasmall silicon waveguides

Observations of Spontaneous Raman Scattering in Silicon Slow-light Photonic Crystal Waveguides

Enhanced Spontaneous Raman Scattering In Silicon Photonic Crystal Waveguides On Insulator

Raman Amplification in Silicon-Nanocrystal Waveguides

Temperature-dependent Raman Scattering of Silicon Nanowires.

Stimulated Raman Scattering In Silicon Photonic Crystal Waveguides Under Continuous Excitation

Self-Phase Modulation and Nonlinear Loss in Silicon Nanophotonic Wires Near the Mid-Infrared Two-Photon Absorption Edge

Raman Scattering As a Probe of Phonon Confinement and Surface Optical Modes in Semiconducting Nanowires

Photocurrent effect in reverse-biased p-n silicon waveguides in communication bands

Angle-Resolved Intensity of In-Axis/Off-Axis Polarized Micro-Raman Spectroscopy for Monocrystalline Silicon

Giant Raman gain in silicon nanocrystals

Continuous-wave Raman amplification in silicon waveguides: beyond the undepleted pump approximation.

Variation of Raman Feature on Excitation Wavelength in Silicon Nanowires

Optical anisotropy and strain-induced birefringence in dislocation-free silicon single crystals

Raman Spectral Study of Silicon Nanowires: High-order Scattering and Phonon Confinement Effects

Low frequency Raman gain measurements using chirped pulses

Laser-Induced Fano Resonance Scattering in Silicon Nanowires

Precise characterization of a silicon carbide waveguide fiber interface

Integrated Raman Spectroscopic Sensor Based on Silicon Nanowire Waveguides

Raman Spectral Study of Silicon Nanowires