Direct growth of mm-size twisted bilayer graphene by plasma-enhanced chemical vapor deposition

Yen-Chun Chen,Wei-Hsiang Lin,Wei-Shiuan Tseng,Chien-Chang Chen,George. R. Rossman,Chii-Dong Chen,Yu-Shu Wu,Nai-Chang Yeh
DOI: https://doi.org/10.1016/j.carbon.2019.09.052
2020-05-11
Abstract:Plasma enhanced chemical vapor deposition (PECVD) techniques have been shown to be an efficient method to achieve single-step synthesis of high-quality monolayer graphene (MLG) without the need of active heating. Here we report PECVD-growth of single-crystalline hexagonal bilayer graphene (BLG) flakes and mm-size BLG films with the interlayer twist angle controlled by the growth parameters. The twist angle has been determined by three experimental approaches, including direct measurement of the relative orientation of crystalline edges between two stacked monolayers by scanning electron microscopy, analysis of the twist angle-dependent Raman spectral characteristics, and measurement of the Moiré period with scanning tunneling microscopy. In mm-sized twisted BLG (tBLG) films, the average twist angle can be controlled from 0 to approximately 20 \degree, and the angular spread for a given growth condition can be limited to < 7 \degree. Different work functions between MLG and BLG have been verified by the Kelvin probe force microscopy and ultraviolet photoelectron spectroscopy. Electrical measurements of back-gated field-effect-transistor devices based on small-angle tBLG samples revealed high-quality electric characteristics at 300 K and insulating temperature dependence down to 100 K. This controlled PECVD-growth of tBLG thus provides an efficient approach to investigate the effect of varying Moiré potentials on tBLG.
Materials Science,Mesoscale and Nanoscale Physics
What problem does this paper attempt to address?
The problem that this paper attempts to solve is to directly grow millimeter - sized bilayer graphene (BLG) with a controllable twist angle by plasma - enhanced chemical vapor deposition (PECVD) technology. Specifically, the research aims to: 1. **Develop an efficient method**: Synthesize single - crystal hexagonal bilayer graphene (BLG) with a controllable twist angle and millimeter - sized bilayer graphene films on copper foil in a single step by PECVD technology without active heating. 2. **Control the twist angle**: By adjusting the growth parameters (such as the partial pressure ratio of CH₄ and H₂), achieve precise control of the twist angle of bilayer graphene, so that the average twist angle can vary between 0° and approximately 20°, and the angle distribution can be limited to less than 7° under given growth conditions. 3. **Verify the quality of the grown samples**: Determine the twist angle by multiple experimental methods (such as scanning electron microscopy, Raman spectroscopy, and scanning tunneling microscopy), and verify the electrical properties and surface characteristics of the samples. 4. **Explore the influence of the Moiré potential on bilayer graphene**: By studying bilayer graphene at different twist angles, explore the influence of the Moiré potential on the physical properties of the material, especially the superconducting properties of small - angle twisted bilayer graphene (tBLG). The achievement of these goals will provide new ways to study the physical properties and potential applications of bilayer graphene.