High-yield fabrication of bubble-free magic-angle twisted bilayer graphene devices with high twist-angle homogeneity

J. Diez-Merida,I. Das,G. Di Battista,A. Diez-Carlon,M. Lee,L. Zeng,K. Watanabe,T. Taniguchi,E. Olsson,D. K. Efetov

2024-05-18

Abstract:Magic-angle twisted bilayer graphene (MATBG) stands as one of the most versatile materials in condensed-matter physics due to its hosting of a wide variety of exotic phases while also offering convenient tunability. However, the fabrication of MATBG is still manual, and remains to be a challenging and inefficient process, with devices being highly dependent on specific fabrication methods, that often result in inconsistency and variability. In this work, we present an optimized protocol for the fabrication of MATBG samples, for which we use deterministic graphene anchoring to stabilize the twist-angle, and a careful bubble removal techniques to ensure a high twist-angle homogeneity. We use low-temperature transport experiments to extract the average twist-angle between pairs of leads. We find that up to 38 percent of the so fabricated devices show micrometer square sized regions with a twist-angle in the range 1.1 plus/minus 0.1 degrees, and a twist-angle variation of only 0.02 degrees, where in some instances such regions were up to 36 micrometer square large. We are certain that the discussed protocols can be directly transferred to non-graphene materials, and will be useful for the growing field of moire materials.

Mesoscale and Nanoscale Physics

What problem does this paper attempt to address?

The problems that this paper attempts to solve are the low yield, high variability, and angular inhomogeneity encountered during the fabrication process of magic - angle twisted bilayer graphene (MATBG) devices. Specifically, due to its unique electronic properties, such as correlated insulator, superconductivity, and magnetism, magic - angle twisted bilayer graphene has important application prospects in condensed - matter physics. However, currently, the fabrication process of MATBG devices still relies on manual operations, which are inefficient and difficult to ensure consistency. These problems seriously affect the reproducibility of experimental results and the understanding of the intrinsic properties of materials.

To solve these problems, the authors propose an optimized fabrication protocol to improve the quality and yield of devices through the following methods:

1. **Deterministic graphene anchoring**: To stabilize the twist angle, a deterministic graphene anchoring technique is adopted.
2. **Bubble - removal technique**: A fine bubble - removal step is introduced to ensure high angular homogeneity.
3. **Improved dry - transfer technique**: An improved dry - transfer technique is used to achieve the fabrication of almost bubble - free MATBG devices, thereby improving the twist - angle precision and homogeneity.

Through these improvements, the authors have achieved that up to approximately 38% of the devices exhibit a twist angle within the range of θ = 1.1 ± 0.1° in the micron - scale region, and the twist - angle variation does not exceed Δθ ≤ 0.02°. In addition, these methods can be directly applied to non - graphene materials and are expected to promote the further development of the moiré materials field.

In summary, the main objective of this paper is to improve the fabrication efficiency and quality of MATBG devices by optimizing the fabrication process, thereby better studying its rich quantum phases and their potential applications.