Enhancing Carrier Mobility in Monolayer MoS 2 Transistors with Process-Induced Strain

Yue Zhang,He Lin Zhao,Siyuan Huang,M. Abir Hossain,Arend M. van der Zande
DOI: https://doi.org/10.1021/acsnano.4c01457
IF: 17.1
2024-05-05
ACS Nano
Abstract:Two-dimensional electronic materials are a promising candidate for beyond-silicon electronics due to their favorable size scaling of electronic performance. However, a major challenge is the heterogeneous integration of 2D materials with CMOS processes while maintaining their excellent properties. In particular, there is a knowledge gap in how thin film deposition and processes interact with 2D materials to alter their strain and doping, both of which have a drastic impact on device properties....
materials science, multidisciplinary,nanoscience & nanotechnology,chemistry, physical
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