Multifitting 2: software for reflectometric, off‐specular and grazing‐incidence small‐angle scattering analysis of multilayer nanofilms

Mikhail Svechnikov

DOI: https://doi.org/10.1107/s1600576724002231

IF: 4.868

2024-04-27

Journal of Applied Crystallography

Abstract:A computer program called Multifitting, which was developed to model the optical properties of multilayer films over a wide range of wavelengths, is described here. Its key features are the ability to work simultaneously with an arbitrary number of reflectometric and scatterometric experimental curves, and an ergonomic graphical user interface that is designed for intensive daily use in the characterization of thin films.Multifitting is a computer program that was originally designed to model the reflection and transmission of shortwave radiation by multilayer nanofilms. Three years have passed since the introduction of this software, and in this paper the focus is on describing the possibilities of Multifitting with regard to off‐specular diffuse scattering and grazing‐incidence small‐angle scattering. The approach to the user interface and to working with the structure model remains the same, and the emphasis is on the ergonomics, calculation speed and intensive use of the program for technological and research tasks. However, the scope of the program has been expanded to make it more useful to existing users, and it may also be of interest to a wider audience.

chemistry, multidisciplinary,crystallography