A versatile simulator for specular reflectivity study of multi-layer thin films

Sirshendu Gayen

DOI: https://doi.org/10.48550/arXiv.1305.6149

2013-09-26

Abstract:A versatile X-ray/neutron reflectivity (specular) simulator using LabVIEW(National Instruments Corp.) for structural study of a multi-layer thin film having any combination, including the repetitions, of nano-scale layers of different materials is presented here (available to download from the link provided at the end of the paper). Inclusion of absorption of individual layers, inter-layer roughnesses, background counts, beam width, instrumental resolution and footprint effect due to finite size of the sample makes the simulated reflectivity close to practical one. The effect of multiple reflection is compared with simulated curves following the exact dynamical theory and approximated kinematical theory. The applicability of further approximation (Born theory) that the incident angle does not change significantly from one layer to another due to refraction is also considered. Brief discussion about reflection from liquid surface/interface and reflectivity study using polarized neutron are also included as a part of the review. Auto-correlation function in connection with the data inversion technique is discussed with possible artifacts for phase-loss problem. An experimental specular reflectivity data of multi-layer erbium stearate Langmuir-Blodgett (LB) film is considered to estimate the parameters by simulating the reflectivity curve.

Mesoscale and Nanoscale Physics,Materials Science,Optics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to develop a multi - functional X - ray/neutron specular reflectivity simulator for studying the structure of multilayer thin films. Specifically, it aims to solve the following problems:

1. **Improve simulation accuracy**: By including factors such as absorption, interface roughness, background count, beam width, instrument resolution, and footprint effects caused by the finite size of the sample, make the simulated reflectivity closer to the actual measured values.

2. **Handle the complexity of multilayer thin films**: Be able to handle any combination of nanoscale multilayer thin films composed of different materials, including repeating layers.

3. **Compare different theoretical models**: Compare the influence of multiple reflections with the exact dynamic theory and the approximate kinematic theory (Born theory), and consider further approximations, that is, assume that the incident angle does not change much between layers.

4. **Expand the application range**: Discuss the reflectivity research of liquid surfaces/interfaces and the reflectivity research using polarized neutrons as part of the review.

5. **Data inversion techniques**: Explore the autocorrelation function and its possible artifacts in the phase - loss problem to improve data inversion techniques.

6. **Experimental verification**: Estimate parameters and verify the effectiveness of the simulator by simulating the experimental specular reflectivity data of multilayer erbium stearic acid Langmuir - Blodgett (LB) films.

### Formula summary

- **Reflectivity formula (Born approximation)**:
\[
R(q_z)=\left(\frac{4\pi r_e}{q_z^2}\right)^2\left|\int_{-\infty}^{+\infty}\frac{d\rho(z)}{dz}e^{iq_z z}dz\right|^2
\]
where $\rho(z)$ is the electron density at depth $z$, and $r_e = \frac{e^2}{m_e c^2}$ is the classical electron radius.

- **Fresnel reflectivity**:
\[
R_F(q_z)=\left(\frac{4\pi r_e\rho_s}{q_z^2}\right)^2
\]

- **Reflectivity including a single layer**:
\[
R(q_z)=\left(\frac{4\pi r_e}{q_z^2}\right)^2\left[\rho_1^2+(\rho_1 - \rho_s)^2-2\rho_1(\rho_1 - \rho_s)\cos(d q_z)\right]
\]

- **Reflectivity considering roughness**:
\[
R(q_z)=\left(\frac{4\pi r_e}{q_z^2}\right)^2\left|\sum_{j = 0}^{n}(\rho_{j + 1}-\rho_j)e^{iq_z z_j}e^{-\frac{q_z^2\sigma_{j,j + 1}^2}{2}}\right|^2
\]

Through these formulas, the paper shows how to implement a multi - functional reflectivity simulator on the LabVIEW platform, thus providing a powerful tool for the study of multilayer thin - film structures.