Polygon-based unified Fourier-modal approach for diffractive optics simulations

K.V. Nikolaev,V. Soltwisch,M.A. Botchev,A. Fernández Herrero,P. Hönicke,F. Scholze,S.N. Yakunin
2024-10-18
Abstract:In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a computational approach for the diffraction calculation for the nanoscale lamellar gratings with an arbitrary line profile shape. In this approach, the gratings line profile is approximated as a polygon. This proves to be convenient since such an approach does not rely on the geometry model of the grating. We test the new approach against other computational theories and a synchrotron scattering experiment.
Computational Physics,Optics
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