Abstract:Micro‐bridge mechanical resonators are realized from crystalline LaAlO3 transparent thin films deposited on SrTiO3 substrates. Such resonators have low surface roughness and a high mechanical Q‐factor, paving the way for the realization of oxide‐based resonant sensors. They are employed as templates for the growth of superconducting YBCO single crystal thin films. A superconducting resonator having mechanical Q‐factor around 180k at room temperature is demonstrated. Micro‐mechanical resonators are building blocks of a variety of applications in basic science and consumer electronics. This device technology is mainly based on well‐established and reproducible silicon‐based fabrication processes with outstanding performances in term of mechanical Q‐factor and sensitivity to external perturbations. Broadening the functionalities of micro‐electro‐mechanical systems (MEMS) by the integration of functional materials is a key step for both applied and fundamental science. However, combining functional materials with silicon‐based devices is challenging. An alternative approach is directly fabricating MEMS based on compounds inherently showing non‐trivial functional properties, such as transition metal oxides. Here, a full‐oxide approach is reported, where a high‐Tc superconductor YBa2Cu3O7 (YBCO) is integrated with high Q‐factor micro‐bridge resonators made of single‐crystal LaAlO3 (LAO) thin films. LAO resonators are tensile strained, with a stress of about 350 MPa, show a Q‐factor above 200k, and have low roughness. YBCO overlayers are grown ex situ by pulsed laser deposition and YBCO/LAO bridges show zero resistance below 78 K and mechanical properties similar to those of bare LAO resonators. These results open new possibilities toward the development of advanced transducers, such as bolometers or magnetic field detectors, as well as experiments in solid state physics, material science, and quantum opto‐mechanics.

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An Investigation of Oxides of Tantalum Produced by Pulsed Laser Ablation and Continuous Wave Laser Heating

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Fabrication of Ultra-High-q Ta2O5 Microdisks by Photolithography-Assisted Chemo-Mechanical Etching

Tantalum Microwave Resonators with Ultra-High Intrinsic Quality Factors

Tunable and stable micro-ring resonator based on thin-film lithium tantalate

Complete Strain Mapping of Nanosheets of Tantalum Disulfide

Integration of High‐Tc Superconductors with High‐Q‐Factor Oxide Mechanical Resonators

Integration of High-Tc Superconductors with High Q Factor Oxide Mechanical Resonators

Strained crystalline nanomechanical resonators with ultralow dissipation

Tuning dissipation dilution in 2D material resonators by MEMS-induced tension

Centimeter-scale nanomechanical resonators with low dissipation

New designs for resonators and filters using lithium tantalate

In-situ tuning of optomechanical crystals with nano-oxidation

Athermal high-Q tantalum-pentoxide-based microresonators on silicon substrates

High Optical Damage Threshold On-Chip Lithium Tantalate Microdisk Resonator.

Spectromicroscopy of Tantalum Oxide Memristors

Coherent modulation of the electron temperature and electron-phonon couplings in a 2D material

Metastable Ta2N3 with Highly Tunable Electrical Conductivity Via Oxygen Incorporation