Abstract:A numerical modeling study, based on 3D finite element method (FEM) simulation and 1D analytical solutions, has been carried out to evaluate the capabilities of two ac methods for measuring in-plane thermal conductivity of thin film deposited on the back of a suspended SiNx membrane setup. Two parallel metal strips are present on the top of the dielectric membrane. One strip (S1) serves as both heater and thermometer, while another one (S2) acts as thermometer only. For a modified phase shift (MPS) method, it is crucial to extract the in-plane thermal diffusivity from the phase shift of the temperature oscillation on S2. It was found that the frequency window for carrying out the data fitting became narrower as the in-plane thermal diffusivity of the composite membrane (<math>α∥,C</math>) increased, primarily due to the failure of the semi-infinite width assumption in the low frequency region. To ensure the validity of the method, the upper limit of <math>α∥,C</math> should not exceed ~1.8 × 10−5 m2 s−1 for the specific membrane dimension under consideration (1 × 1 mm2). On the other hand, inspired by a modified Ångström method proposed by Zhu recently, we suggest a new data reduction methodology which takes advantage of the phase shift on both S1 and S2 as well as the amplitude on S1. Based on the simulation results, it is expected that the non-ideality associated with the three "observables" may be at least partially canceled out. Therefore, the frequency window selection for carrying out the data fitting is not sensitive to the magnitude of <math>α∥,C</math> and the upper limit of measurable <math>αC,∥</math> can be further increased with respect to the MPS method. For typical specimen films whose in-plane thermal conductivity ranges from 0.84 W m−1 K−1 to 50 W m−1 K−1, the method proposed here yields a theoretical measurement uncertainty of less than 5%.

Influence of metal thickness on phase velocity and thermal sensitivity of SAW devices

Comparative Study of SAW Temperature Sensor Based on Different Piezoelectric Materials and Crystal Cuts for Passive Wireless Measurement

Temperature dependence of surface acoustic wave velocity in thin metal films

Investigation of temperature characteristics of surface acoustic waves on quartz substrates by using theory of small amplitude vibrations in deformed media

Thermal Annealing Impact on the Sensitivity of Piezomagnetic Surface Acoustic Waveguide to Applied Magnetic Field

Thermal Tuning of the Interfacial Adhesive Layer on the Band Gaps in a One-Dimensional Phononic Crystal

Super-Suppression of Long Phonon Mean-Free-Paths in Nano-engineered Si due to Heat Current Anticorrelations

Recent Efforts in Modelling Combined Rate, Size and Thermal Effects on Single Crystal Strength

Investigation of Elastic Properties of WO3 Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices

Role of the electron-phonon coupling in tuning the thermal boundary conductance at metal-dielectric interfaces by inserting ultrathin metal interlayers

An Experimental and Theoretical Study of Impact of Device Parameters on Performance of AlN/Sapphire-Based SAW Temperature Sensors

Simulation and Experimental Study of SAW Temperature Sensor Based on ALN Piezoelectric Layer

Study on the Attributes of Transverse Surface Waves in a Layered Piezoelectric Semi-Space with Surface Elasticity Theory and Extended Stroh Formalism

Modeling effective thermal conductivity enhanced by surface waves using the Boltzmann transport equation

Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors

Numerical modeling of in-plane thermal conductivity measurement methods based on a suspended membrane setup

Design and Investigation of a High-Performance Quartz-Based SAW Temperature Sensor

Sensitivity Enhancement of Thermal Acoustic Particle Velocity Sensor Based on Metal Film Optimization

Design Optimization of Surface Acoustic Wave Devices and Investigation of Fabricated Devices under Temperature, Humidity and Steam Environments

Temperature dependent angular dispersions of surface acoustic waves on GaAs

Temperature-mediated transition from Dyakonov-Tamm surface waves to surface-plasmon-polariton waves