Investigation of temperature characteristics of surface acoustic waves on quartz substrates by using theory of small amplitude vibrations in deformed media

罗中涌,曹明,公勋,章德
DOI: https://doi.org/10.13232/j.cnki.jnju.2013.01.005
2013-01-01
Abstract:The temperature characteristics are important for surface acoustic wave(SAW)devices.And quartz substrates are very popular for SAW application.Conventionally,when temperature characteristics of SAW are investigated,the dimensional change due to environmental temperature change is first considered and then the temperature derivatives of the elastic and piezoelectric constants are introduced to analyze it.However,the used temperature derivatives of the effective elastic constants are referred to the variable temperature-dependent intermediate state rather than the fixed reference state,to which the fundamental elastic constants are referred.The conventional method cannot conveniently be employed because temperature change usually leads to initial inhomogeneous strain distribution in the device structure.P.C.Y.Lee and Y.K.Yong have given a complete set of theory for small amplitude vibrations in thermally deformed media.They have successfully applied their theory to investigate the temperature characteristics of bulk wave resonators of quartz.In this paper,their work is further extended to include the piezoelectricity.The temperature characteristics of SAW on quartz plates are investigated by using the new method.For the generality of the present method,given the initial strain distribution in the device structure is calculated first,the new method is ready for analyzing the multilayered SAW substrate or sensors.
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