Simulation and Experimental Study of SAW Temperature Sensor Based on ALN Piezoelectric Layer

Cao Sen,Zhao Zhipeng,Liu Zhichun,Sun Hongyi,Chen Jinbin,Yu Xiaomei,Liang Junsheng

DOI: https://doi.org/10.3969/j.issn.1009-9492.2022.11.042

2022-01-01

Abstract:The traditional surface acoustic wave（SAW） temperature sensors are facing the chanllenges of small temperature range and low sensitivity in measurement. In order to meet the high temperature detection requirement in harsh environment including industrial production and aerospace, a structure of interdigital transducer（IDT）/ALN/Sapphire was designed since the ALN can maintain good piezoelectric property at high temperatures. Modeling simulation and calculation comparison were developed to obtain the high temperature frequency coefficient（TCF）, and the excited Rayleigh wave mode was also used for the temperature calibration. The influences of the thickness of piezoelectric layer,metallization ratio and interdigital electrode thickness on Rayleigh wave velocity and electromechanical coupling coefficient were systematically studied respectively. In addition, the thickness of the ALN films on the TCF was also investigated. Results show that the wave velocity and electromechanical coupling coefficient can reach up to 5 780 m/s and 0.82% under ideal parameters. High quality C-axis oriented ALN thin films were deposited on Sapphire substrates by RF magnetron sputtering system, and then Pt/Ta electrodes were fabricated using MEMS technique. The temperature frequency coefficient of the SAW was about -53.5 ppm/℃, and it also had a good linear relationship between frequency and temperature at 800 ℃, which was consistent with the results of simulation. The sensor has the larger temperature measurement range and higher sensitivity than that of the traditional SAW temperature sensor.