Ultra high temperature saw sensors based on signle crystalline a1n and multilayer composite electrode

Yihong Zhang,Weipeng Xuan,Daiqing Zhu,Shurong Dong,Hao Jin,Jikui Luo
DOI: https://doi.org/10.1109/SPAWDA56268.2022.10045964
2022-01-01
Abstract:A newly constructed surface acoustic wave (SAW) device was used to broaden the applicability of sensors at ultra-high temperatures (> 1000 C) and increase the stability under ultra-high temperatures. The choice of piezoelectric substrate and the design of temperature-resistant electrodes were both addressed in this design. We investigate the stability of A1N piezoelectric film for ultra-high-temperature applications, based on the reliability of A1N/Sapphire structure in high-temperature applications. In addition, a Pt-Rh and A1203 composite electrode structure was constructed and studied. Finally, a high temperature sensing resistant experiment based on single crystalline piezoelectric AN was carried out, demonstrating that the developed SAW device can still work well at temperatures up to 1200 C. The frequency response change of the SAW sensor under high temperatures was obtained and analyzed.
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