High-Photoresponsivity Self-Powered a -, ε-, and β-Ga 2 O 3 /p-GaN Heterojunction UV Photodetectors with an In Situ GaON Layer by MOCVD

Yongjian Ma,Tiwei Chen,Xiaodong Zhang,Wenbo Tang,Boyuan Feng,Yu Hu,Li Zhang,Xin Zhou,Xing Wei,Kun Xu,Dinusha Mudiyanselage,Houqiang Fu,Baoshun Zhang
DOI: https://doi.org/10.1021/acsami.2c06927
2022-07-27
Abstract:In this paper, self-powered ultraviolet (UV) photodetectors with high response performance based on Ga(2)O(3)/p-GaN were fabricated by metal-organic chemical vapor deposition (MOCVD). The effects of different crystal phases of Ga(2)O(3) (including a, ε, ε/β, and β) grown on p-GaN films on the performance of photodetectors were systematically studied. Moreover, an in situ GaON dielectric layer improved the responsivity of Ga(2)O(3)/p-GaN photodetectors by 20 times. All Ga(2)O(3)/p-GaN...
materials science, multidisciplinary,nanoscience & nanotechnology
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