Abstract:One approach to extend the acoustic applications of aluminum nitride (AlN) in the GHz frequency range is to take advantage of the piezoelectric performance and high acoustic velocity (∼11 350 m/s) along the c-axis of this material. In particular, in the case of high-frequency micro-electromechanical systems, it should be possible to simplify the construction of resonators by using a-plane AlN-based structures. In the work described in this Letter, a single-crystalline a-plane AlN layer on an r-plane sapphire substrate is obtained by combining sputtering and high-temperature annealing. Based on this non-polar AlN, a resonator with only planar interdigital transducer electrodes is fabricated. Experiments on this resonator reveal simultaneous excitation of an anisotropic Rayleigh surface acoustic wave (SAW) at 2.38 GHz and a laterally excited bulk acoustic wave (LBAW) at 4.00 GHz. It is found that the Rayleigh SAW exhibits outstanding performance, with a quality factor as high as 2458 and great stability under variations in temperature. The LBAW at 4.00 GHz is excited by pure planar interdigitated electrodes without the need for any cavity or bottom electrode structure, thus demonstrating a promising approach to the construction of high-frequency resonators with a relatively simple structure.

Dispersion engineered high-Q silicon Nitride Ring-Resonators via Atomic Layer Deposition

Dispersion engineering of high-Q silicon microresonators via thermal oxidation

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

Optical frequency comb generation from aluminum nitride micro-ring resonator

Conformal Dielectric Overlayers for Engineering Dispersion and Effective Nonlinearity of Silicon Nanophotonic Wires.

Tuning of Silicon Nitride Micro Cavities by Controlled Nanolayer Deposition

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

In-resonator variation of waveguide cross-sections for dispersion control of aluminum nitride micro-rings

Vertically Stacked Silicon Nitride Coupled Microdisk Resonators

High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics

Silicon Micro-Cavities And Their System Applications

Integrated high frequency aluminum nitride optomechanical resonators

Aluminum Nitride-on-sapphire Platform for Integrated High-Q Microresonators

Anomalous Dispersion in 300 Nm-Thick Si3n4 Concentric-Ring-Resonators

Dispersion Engineering and Frequency Comb Generation in Thin Silicon Nitride Concentric Microresonators.

Advanced dispersion engineering of a III-Nitride micro-resonator for a blue/UV frequency comb

Coherent Frequency Comb Generation in a Silicon Nitride Microresonator with Anomalous Dispersion

Niobate-on-Niobate Resonators with Aluminum Electrodes

Photonic Damascene Process for Integrated High-Q Microresonator Based Nonlinear Photonics

Alumina coating for dispersion management in ultra-high Q microresonators